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- Q62580319 description "2003 മാര്ച്ച് 1 നു പ്രസിദ്ധീകരിച്ച ശാസ്ത്ര ലേഖനം" @default.
- Q62580319 description "article scientifique publié en 2003" @default.
- Q62580319 description "artículu científicu" @default.
- Q62580319 description "wetenschappelijk artikel" @default.
- Q62580319 description "наукова стаття, опублікована в березні 2003" @default.
- Q62580319 name "Plasma-enhanced chemical vapor deposition of low-kdielectric films using methylsilane, dimethylsilane, and trimethylsilane precursors" @default.
- Q62580319 name "Plasma-enhanced chemical vapor deposition of low-kdielectric films using methylsilane, dimethylsilane, and trimethylsilane precursors" @default.
- Q62580319 type Item @default.
- Q62580319 label "Plasma-enhanced chemical vapor deposition of low-kdielectric films using methylsilane, dimethylsilane, and trimethylsilane precursors" @default.
- Q62580319 label "Plasma-enhanced chemical vapor deposition of low-kdielectric films using methylsilane, dimethylsilane, and trimethylsilane precursors" @default.
- Q62580319 prefLabel "Plasma-enhanced chemical vapor deposition of low-kdielectric films using methylsilane, dimethylsilane, and trimethylsilane precursors" @default.
- Q62580319 prefLabel "Plasma-enhanced chemical vapor deposition of low-kdielectric films using methylsilane, dimethylsilane, and trimethylsilane precursors" @default.
- Q62580319 P1433 Q62580319-2B52441A-586C-48A6-BC1D-B03FE4F52941 @default.
- Q62580319 P1476 Q62580319-5876C164-6FBA-4086-8852-6B1481BE33FD @default.
- Q62580319 P2093 Q62580319-C2B9AFCC-2490-465B-8A31-F7841EE73275 @default.
- Q62580319 P2093 Q62580319-DB8A5F2C-00EE-4C9B-AE94-4C6841D35DFC @default.
- Q62580319 P304 Q62580319-72676335-09E2-455E-8DF1-CF7D1EAF9206 @default.
- Q62580319 P31 Q62580319-20EF805E-6136-4135-B702-3FB1CD3918AA @default.
- Q62580319 P356 Q62580319-755CB790-45E9-43CA-A937-8D57DC4A7D83 @default.
- Q62580319 P433 Q62580319-5C04CC57-8B74-43FA-91AD-284A08FC173B @default.
- Q62580319 P478 Q62580319-B3C1D165-46E3-4225-9CD6-4337809DDC2A @default.
- Q62580319 P577 Q62580319-5DDB6CCB-40B6-4EC9-9E7B-C1768F473D01 @default.
- Q62580319 P356 1.1539086 @default.
- Q62580319 P1433 Q13739484 @default.
- Q62580319 P1476 "Plasma-enhanced chemical vapor deposition of low-kdielectric films using methylsilane, dimethylsilane, and trimethylsilane precursors" @default.
- Q62580319 P2093 "Karen K. Gleason" @default.
- Q62580319 P2093 "Qingguo Wu" @default.
- Q62580319 P304 "388-393" @default.
- Q62580319 P31 Q13442814 @default.
- Q62580319 P356 "10.1116/1.1539086" @default.
- Q62580319 P433 "2" @default.
- Q62580319 P478 "21" @default.
- Q62580319 P577 "2003-03-01T00:00:00Z" @default.