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- Q62590294 description "im Mai 2014 veröffentlichter wissenschaftlicher Artikel" @default.
- Q62590294 description "wetenschappelijk artikel" @default.
- Q62590294 description "наукова стаття, опублікована в травні 2014" @default.
- Q62590294 name "Continuous-Wave Laser Annealing of a Si/SiO 2 Superlattice: Effect of the Ambient Atmosphere and Exposure Period" @default.
- Q62590294 name "Continuous-Wave Laser Annealing of a Si/SiO 2 Superlattice: Effect of the Ambient Atmosphere and Exposure Period" @default.
- Q62590294 type Item @default.
- Q62590294 label "Continuous-Wave Laser Annealing of a Si/SiO 2 Superlattice: Effect of the Ambient Atmosphere and Exposure Period" @default.
- Q62590294 label "Continuous-Wave Laser Annealing of a Si/SiO 2 Superlattice: Effect of the Ambient Atmosphere and Exposure Period" @default.
- Q62590294 prefLabel "Continuous-Wave Laser Annealing of a Si/SiO 2 Superlattice: Effect of the Ambient Atmosphere and Exposure Period" @default.
- Q62590294 prefLabel "Continuous-Wave Laser Annealing of a Si/SiO 2 Superlattice: Effect of the Ambient Atmosphere and Exposure Period" @default.
- Q62590294 P1433 Q62590294-78AA1386-BD9D-4872-BC54-58FA82110C1F @default.
- Q62590294 P1476 Q62590294-EDF539A0-0887-47A8-8CB7-7B427E06B7B0 @default.
- Q62590294 P2093 Q62590294-53A0BCD5-F5DE-4487-8805-9B1B7794307F @default.
- Q62590294 P2093 Q62590294-959E88F9-1519-48FF-9957-5B10D9B5F290 @default.
- Q62590294 P2093 Q62590294-A6230CBA-6109-4280-B6F6-EF75DE813805 @default.
- Q62590294 P2093 Q62590294-CAA34B06-E188-4185-B292-9ED2A5AF1E18 @default.
- Q62590294 P2093 Q62590294-D020B51D-9157-4018-91F5-30DA5B4E7B01 @default.
- Q62590294 P304 Q62590294-A9CA762B-DB85-4990-AC42-3DDFEA0B79C7 @default.
- Q62590294 P31 Q62590294-A417CF31-5175-4884-B1FC-247FFA64CC24 @default.
- Q62590294 P356 Q62590294-A2F88FB1-BFC6-4153-97E8-C69E8B28DE1A @default.
- Q62590294 P433 Q62590294-F63769DF-B5BB-4E10-A680-77258FE64470 @default.
- Q62590294 P478 Q62590294-EFBE8F55-540B-4BD6-9E92-1485DE735D7F @default.
- Q62590294 P50 Q62590294-54E8CA03-EBA0-4F24-9A49-D5C59CC4F7C7 @default.
- Q62590294 P50 Q62590294-9309CD23-3F3A-4F0A-8709-6ECFFEA9C6AC @default.
- Q62590294 P577 Q62590294-CE0E8746-9ADD-4831-8BF9-33F40E27CA6C @default.
- Q62590294 P356 SAM.2014.1850 @default.
- Q62590294 P1433 Q2114582 @default.
- Q62590294 P1476 "Continuous-Wave Laser Annealing of a Si/SiO 2 Superlattice: Effect of the Ambient Atmosphere and Exposure Period" @default.
- Q62590294 P2093 "Esa Puukilainen" @default.
- Q62590294 P2093 "Marianna Kemell" @default.
- Q62590294 P2093 "Mikko Ritala" @default.
- Q62590294 P2093 "Sergei Novikov" @default.
- Q62590294 P2093 "Timur Nikitin" @default.
- Q62590294 P304 "1000-1010" @default.
- Q62590294 P31 Q13442814 @default.
- Q62590294 P356 "10.1166/SAM.2014.1850" @default.
- Q62590294 P433 "5" @default.
- Q62590294 P478 "6" @default.
- Q62590294 P50 Q109685636 @default.
- Q62590294 P50 Q41863393 @default.
- Q62590294 P577 "2014-05-01T00:00:00Z" @default.