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- Q62599916 description "wetenschappelijk artikel" @default.
- Q62599916 description "наукова стаття, опублікована у квітні 2014" @default.
- Q62599916 name "Process and reliability of SF 6 /O 2 plasma etched copper TSVs" @default.
- Q62599916 name "Process and reliability of SF 6 /O 2 plasma etched copper TSVs" @default.
- Q62599916 type Item @default.
- Q62599916 label "Process and reliability of SF 6 /O 2 plasma etched copper TSVs" @default.
- Q62599916 label "Process and reliability of SF 6 /O 2 plasma etched copper TSVs" @default.
- Q62599916 prefLabel "Process and reliability of SF 6 /O 2 plasma etched copper TSVs" @default.
- Q62599916 prefLabel "Process and reliability of SF 6 /O 2 plasma etched copper TSVs" @default.
- Q62599916 P1476 Q62599916-33026A43-4D93-4F59-9A71-2587C09EE4DB @default.
- Q62599916 P2093 Q62599916-1A0CE4A7-F509-436D-84F1-8A1A2311C5A9 @default.
- Q62599916 P2093 Q62599916-5366A968-C518-407D-9D7F-C9B07F455AF3 @default.
- Q62599916 P2093 Q62599916-82140C03-9733-47EF-B88E-5B8244C33938 @default.
- Q62599916 P31 Q62599916-9CEA79B5-6FF1-4D93-9A54-AB37CD0F2FC3 @default.
- Q62599916 P356 Q62599916-4799E65B-F42E-4388-A0A2-C6CA20E493A1 @default.
- Q62599916 P577 Q62599916-E90DED6C-B609-4414-8554-AFE05A22FF83 @default.
- Q62599916 P356 EUROSIME.2014.6813768 @default.
- Q62599916 P1476 "Process and reliability of SF 6 /O 2 plasma etched copper TSVs" @default.
- Q62599916 P2093 "Lado Filipovic" @default.
- Q62599916 P2093 "Roberto Lacerda de Orio" @default.
- Q62599916 P2093 "Siegfried Selberherr" @default.
- Q62599916 P31 Q13442814 @default.
- Q62599916 P356 "10.1109/EUROSIME.2014.6813768" @default.
- Q62599916 P577 "2014-04-01T00:00:00Z" @default.