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- Q62599931 description "article scientifique publié en 2014" @default.
- Q62599931 description "wetenschappelijk artikel" @default.
- Q62599931 description "наукова стаття, опублікована у вересні 2014" @default.
- Q62599931 name "The effects of etching and deposition on the performance and stress evolution of open through silicon vias" @default.
- Q62599931 name "The effects of etching and deposition on the performance and stress evolution of open through silicon vias" @default.
- Q62599931 type Item @default.
- Q62599931 label "The effects of etching and deposition on the performance and stress evolution of open through silicon vias" @default.
- Q62599931 label "The effects of etching and deposition on the performance and stress evolution of open through silicon vias" @default.
- Q62599931 prefLabel "The effects of etching and deposition on the performance and stress evolution of open through silicon vias" @default.
- Q62599931 prefLabel "The effects of etching and deposition on the performance and stress evolution of open through silicon vias" @default.
- Q62599931 P1433 Q62599931-B2F2CB0C-EDC7-4F19-8AFB-036B8C016772 @default.
- Q62599931 P1476 Q62599931-1BCC2146-32A0-40F5-A7D6-7FA26222BABC @default.
- Q62599931 P2093 Q62599931-13EC262A-026B-4202-B782-CEDCDA9DE165 @default.
- Q62599931 P2093 Q62599931-F4C72175-9716-4E19-867C-9A46152A602C @default.
- Q62599931 P304 Q62599931-12F18887-ED53-4EBF-854B-703E53B20C46 @default.
- Q62599931 P31 Q62599931-AD6C6865-7C51-4BE3-948F-40CEEB1E4168 @default.
- Q62599931 P356 Q62599931-83B36C13-E297-4E15-AB59-B4E5142C4BC2 @default.
- Q62599931 P433 Q62599931-9A917A8F-7970-491B-846D-87B7F00E2237 @default.
- Q62599931 P478 Q62599931-CE55D5B4-6666-4D33-8195-EA8CC50EE755 @default.
- Q62599931 P577 Q62599931-97BB0F20-1E28-4E97-85DA-A3F782A7733D @default.
- Q62599931 P8978 Q62599931-341F242F-0132-4A60-9BFB-514B18A0C36B @default.
- Q62599931 P356 J.MICROREL.2014.07.014 @default.
- Q62599931 P8978 FilipovicS14 @default.
- Q62599931 P1433 Q13852898 @default.
- Q62599931 P1476 "The effects of etching and deposition on the performance and stress evolution of open through silicon vias" @default.
- Q62599931 P2093 "Lado Filipovic" @default.
- Q62599931 P2093 "Siegfried Selberherr" @default.
- Q62599931 P304 "1953-1958" @default.
- Q62599931 P31 Q13442814 @default.
- Q62599931 P356 "10.1016/J.MICROREL.2014.07.014" @default.
- Q62599931 P433 "9-10" @default.
- Q62599931 P478 "54" @default.
- Q62599931 P577 "2014-09-01T00:00:00Z" @default.
- Q62599931 P8978 "journals/mr/FilipovicS14" @default.