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- Q62600268 description "wetenschappelijk artikel" @default.
- Q62600268 description "наукова стаття, опублікована у квітні 2007" @default.
- Q62600268 name "Comparison of deposition models for a TEOS LPCVD process" @default.
- Q62600268 name "Comparison of deposition models for a TEOS LPCVD process" @default.
- Q62600268 type Item @default.
- Q62600268 label "Comparison of deposition models for a TEOS LPCVD process" @default.
- Q62600268 label "Comparison of deposition models for a TEOS LPCVD process" @default.
- Q62600268 prefLabel "Comparison of deposition models for a TEOS LPCVD process" @default.
- Q62600268 prefLabel "Comparison of deposition models for a TEOS LPCVD process" @default.
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- Q62600268 P356 Q62600268-8A105B00-BD1A-4A0A-9289-6BEA86A804B6 @default.
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- Q62600268 P8978 Q62600268-F56BC498-4AEC-486F-BA52-CD15580D034C @default.
- Q62600268 P356 J.MICROREL.2007.01.058 @default.
- Q62600268 P8978 HolzerSKGS07 @default.
- Q62600268 P1433 Q13852898 @default.
- Q62600268 P1476 "Comparison of deposition models for a TEOS LPCVD process" @default.
- Q62600268 P2093 "Alireza Sheikholeslami" @default.
- Q62600268 P2093 "Markus Karner" @default.
- Q62600268 P2093 "Siegfried Selberherr" @default.
- Q62600268 P2093 "Stefan Holzer" @default.
- Q62600268 P2093 "Tibor Grasser" @default.
- Q62600268 P304 "623-625" @default.
- Q62600268 P31 Q13442814 @default.
- Q62600268 P356 "10.1016/J.MICROREL.2007.01.058" @default.
- Q62600268 P433 "4-5" @default.
- Q62600268 P478 "47" @default.
- Q62600268 P577 "2007-04-01T00:00:00Z" @default.
- Q62600268 P8978 "journals/mr/HolzerSKGS07" @default.