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- Q62600509 description "article scientifique publié en 1998" @default.
- Q62600509 description "wetenschappelijk artikel" @default.
- Q62600509 description "наукова стаття, опублікована в червні 1998" @default.
- Q62600509 name "Three-dimensional photolithography simulator including rigorous nonplanar exposure simulation for off-axis illumination" @default.
- Q62600509 name "Three-dimensional photolithography simulator including rigorous nonplanar exposure simulation for off-axis illumination" @default.
- Q62600509 type Item @default.
- Q62600509 label "Three-dimensional photolithography simulator including rigorous nonplanar exposure simulation for off-axis illumination" @default.
- Q62600509 label "Three-dimensional photolithography simulator including rigorous nonplanar exposure simulation for off-axis illumination" @default.
- Q62600509 prefLabel "Three-dimensional photolithography simulator including rigorous nonplanar exposure simulation for off-axis illumination" @default.
- Q62600509 prefLabel "Three-dimensional photolithography simulator including rigorous nonplanar exposure simulation for off-axis illumination" @default.
- Q62600509 P1476 Q62600509-9747CA5D-7C71-4043-9A39-DF305C5FB61E @default.
- Q62600509 P2093 Q62600509-BB06D892-416D-4AFF-B6B2-AA766DFB8513 @default.
- Q62600509 P2093 Q62600509-BDC966B1-EF23-4199-A282-E9CB87E51C7A @default.
- Q62600509 P31 Q62600509-420B70D9-10FC-4E8E-B5D5-52F7239F7CEF @default.
- Q62600509 P356 Q62600509-FA4D3F74-D3B8-4B65-B176-3C679A71990F @default.
- Q62600509 P577 Q62600509-71121468-7A73-4D31-B841-72F4F2275DC6 @default.
- Q62600509 P356 12.310809 @default.
- Q62600509 P1476 "Three-dimensional photolithography simulator including rigorous nonplanar exposure simulation for off-axis illumination" @default.
- Q62600509 P2093 "Heinrich Kirchauer" @default.
- Q62600509 P2093 "Siegfried Selberherr" @default.
- Q62600509 P31 Q13442814 @default.
- Q62600509 P356 "10.1117/12.310809" @default.
- Q62600509 P577 "1998-06-29T00:00:00Z" @default.