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- Q62613871 description "article published in 2012" @default.
- Q62613871 description "article scientifique publié en 2012" @default.
- Q62613871 description "im April 2012 veröffentlichter wissenschaftlicher Artikel" @default.
- Q62613871 description "wetenschappelijk artikel" @default.
- Q62613871 description "наукова стаття, опублікована у квітні 2012" @default.
- Q62613871 name "Global and local planarization of surface roughness by chemical vapor deposition of organosilicon polymer for barrier applications" @default.
- Q62613871 name "Global and local planarization of surface roughness by chemical vapor deposition of organosilicon polymer for barrier applications" @default.
- Q62613871 type Item @default.
- Q62613871 label "Global and local planarization of surface roughness by chemical vapor deposition of organosilicon polymer for barrier applications" @default.
- Q62613871 label "Global and local planarization of surface roughness by chemical vapor deposition of organosilicon polymer for barrier applications" @default.
- Q62613871 prefLabel "Global and local planarization of surface roughness by chemical vapor deposition of organosilicon polymer for barrier applications" @default.
- Q62613871 prefLabel "Global and local planarization of surface roughness by chemical vapor deposition of organosilicon polymer for barrier applications" @default.
- Q62613871 P1433 Q62613871-76BD354F-2097-4F01-A799-D8A9F55FBE0E @default.
- Q62613871 P1476 Q62613871-DCE57D5B-A018-44E0-B9A6-2EA2545C38F2 @default.
- Q62613871 P2093 Q62613871-D5A5F3AE-7149-4218-9AAE-A5A560A143B3 @default.
- Q62613871 P2093 Q62613871-FE1349E2-4443-43A7-A27A-090245D7A95F @default.
- Q62613871 P304 Q62613871-0CF60E36-D119-43D6-8190-5D85EA982F10 @default.
- Q62613871 P31 Q62613871-0D0656C5-0489-4558-B068-92796761DF69 @default.
- Q62613871 P356 Q62613871-DF1CB995-C395-45C7-86C3-782D64C2F63B @default.
- Q62613871 P433 Q62613871-17F2C775-75B8-4DBA-8906-63E678D3C222 @default.
- Q62613871 P478 Q62613871-0BA4688E-24DD-4821-899F-DB9737EF9BCB @default.
- Q62613871 P577 Q62613871-3E16650C-DA36-48ED-9338-965BF6A8EF0C @default.
- Q62613871 P356 1.3702428 @default.
- Q62613871 P1433 Q1987941 @default.
- Q62613871 P1476 "Global and local planarization of surface roughness by chemical vapor deposition of organosilicon polymer for barrier applications" @default.
- Q62613871 P2093 "Anna Maria Coclite" @default.
- Q62613871 P2093 "Karen K. Gleason" @default.
- Q62613871 P304 "073516" @default.
- Q62613871 P31 Q13442814 @default.
- Q62613871 P356 "10.1063/1.3702428" @default.
- Q62613871 P433 "7" @default.
- Q62613871 P478 "111" @default.
- Q62613871 P577 "2012-04-01T00:00:00Z" @default.