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- Q62977268 description "wetenschappelijk artikel" @default.
- Q62977268 description "наукова стаття, опублікована в серпні 2008" @default.
- Q62977268 name "A growth rate, structure and surface morphology study of Si1-x-yGexCy films deposited by ArF-LCVD in tilted geometry" @default.
- Q62977268 name "A growth rate, structure and surface morphology study of Si1-x-yGexCy films deposited by ArF-LCVD in tilted geometry" @default.
- Q62977268 type Item @default.
- Q62977268 label "A growth rate, structure and surface morphology study of Si1-x-yGexCy films deposited by ArF-LCVD in tilted geometry" @default.
- Q62977268 label "A growth rate, structure and surface morphology study of Si1-x-yGexCy films deposited by ArF-LCVD in tilted geometry" @default.
- Q62977268 prefLabel "A growth rate, structure and surface morphology study of Si1-x-yGexCy films deposited by ArF-LCVD in tilted geometry" @default.
- Q62977268 prefLabel "A growth rate, structure and surface morphology study of Si1-x-yGexCy films deposited by ArF-LCVD in tilted geometry" @default.
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- Q62977268 P356 J.VACUUM.2008.03.018 @default.
- Q62977268 P1433 Q3974653 @default.
- Q62977268 P1476 "A growth rate, structure and surface morphology study of Si1-x-yGexCy films deposited by ArF-LCVD in tilted geometry" @default.
- Q62977268 P2093 "B. León" @default.
- Q62977268 P2093 "C. Serra" @default.
- Q62977268 P2093 "E. López" @default.
- Q62977268 P2093 "J. Serra" @default.
- Q62977268 P2093 "P. González" @default.
- Q62977268 P2093 "S. Chiussi" @default.
- Q62977268 P2093 "U. Kosch" @default.
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- Q62977268 P304 "1525-1528" @default.
- Q62977268 P31 Q13442814 @default.
- Q62977268 P356 "10.1016/J.VACUUM.2008.03.018" @default.
- Q62977268 P433 "12" @default.
- Q62977268 P478 "82" @default.
- Q62977268 P577 "2008-08-01T00:00:00Z" @default.
- Q62977268 P921 Q214781 @default.