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- Q63487986 description "article scientifique publié en 1989" @default.
- Q63487986 description "im April 1989 veröffentlichter wissenschaftlicher Artikel" @default.
- Q63487986 description "wetenschappelijk artikel" @default.
- Q63487986 description "наукова стаття, опублікована у квітні 1989" @default.
- Q63487986 name "Study of electrochemical etch-stop for high-precision thickness control of silicon membranes" @default.
- Q63487986 name "Study of electrochemical etch-stop for high-precision thickness control of silicon membranes" @default.
- Q63487986 type Item @default.
- Q63487986 label "Study of electrochemical etch-stop for high-precision thickness control of silicon membranes" @default.
- Q63487986 label "Study of electrochemical etch-stop for high-precision thickness control of silicon membranes" @default.
- Q63487986 prefLabel "Study of electrochemical etch-stop for high-precision thickness control of silicon membranes" @default.
- Q63487986 prefLabel "Study of electrochemical etch-stop for high-precision thickness control of silicon membranes" @default.
- Q63487986 P1433 Q63487986-8F2C2ADB-C93A-4935-BE13-9053B2E5A3C1 @default.
- Q63487986 P1476 Q63487986-C37DC567-D948-46A4-8B3C-4CC91F631FA5 @default.
- Q63487986 P2093 Q63487986-074F7A79-E9FD-4DA7-8893-EB63CFD4462B @default.
- Q63487986 P2093 Q63487986-617B3DED-63DA-400F-9C07-8DA14658804D @default.
- Q63487986 P2093 Q63487986-DE4C80D9-E7C0-4A26-81B6-76DD6B42804A @default.
- Q63487986 P304 Q63487986-7364DD9B-8532-4CE6-980A-67D1E28C0B28 @default.
- Q63487986 P31 Q63487986-CF26B37B-5352-42C5-8621-9E7EED66BA77 @default.
- Q63487986 P356 Q63487986-4213A9B7-6CEB-445D-932B-2198BDAA30EE @default.
- Q63487986 P433 Q63487986-C55B3D60-374F-4139-9863-A33A78508EEC @default.
- Q63487986 P478 Q63487986-1D45DF02-9B08-4CA5-BC22-7D6FFDA020EB @default.
- Q63487986 P50 Q63487986-35BFD27D-F418-4ED6-BE7E-2B02DE54E900 @default.
- Q63487986 P577 Q63487986-35DD9D5C-6701-4BBD-AF10-BD9B01101A3B @default.
- Q63487986 P356 16.22472 @default.
- Q63487986 P1433 Q2269764 @default.
- Q63487986 P1476 "Study of electrochemical etch-stop for high-precision thickness control of silicon membranes" @default.
- Q63487986 P2093 "B. Kloeck" @default.
- Q63487986 P2093 "R.L. Smith" @default.
- Q63487986 P2093 "S.D. Collins" @default.
- Q63487986 P304 "663-669" @default.
- Q63487986 P31 Q13442814 @default.
- Q63487986 P356 "10.1109/16.22472" @default.
- Q63487986 P433 "4" @default.
- Q63487986 P478 "36" @default.
- Q63487986 P50 Q116266193 @default.
- Q63487986 P577 "1989-04-01T00:00:00Z" @default.