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- Q63957742 description "article scientifique publié en 2002" @default.
- Q63957742 description "im Januar 2002 veröffentlichter wissenschaftlicher Artikel" @default.
- Q63957742 description "wetenschappelijk artikel" @default.
- Q63957742 description "наукова стаття, опублікована в січні 2002" @default.
- Q63957742 name "How to exploit ion-induced stress relaxation to grow thick c-BN films" @default.
- Q63957742 name "How to exploit ion-induced stress relaxation to grow thick c-BN films" @default.
- Q63957742 type Item @default.
- Q63957742 label "How to exploit ion-induced stress relaxation to grow thick c-BN films" @default.
- Q63957742 label "How to exploit ion-induced stress relaxation to grow thick c-BN films" @default.
- Q63957742 prefLabel "How to exploit ion-induced stress relaxation to grow thick c-BN films" @default.
- Q63957742 prefLabel "How to exploit ion-induced stress relaxation to grow thick c-BN films" @default.
- Q63957742 P1433 Q63957742-DBD94718-07BC-4919-AD6D-BD562823257C @default.
- Q63957742 P1476 Q63957742-574E1CD7-3A47-443C-A3F3-4B29707E60D3 @default.
- Q63957742 P2093 Q63957742-02FDA5A2-1094-4747-A614-83B5E8E51281 @default.
- Q63957742 P2093 Q63957742-04402D78-09B5-445C-B748-4FDFEC6CEB88 @default.
- Q63957742 P2093 Q63957742-37C48548-0D7A-4717-B141-D9A511410110 @default.
- Q63957742 P2093 Q63957742-5490AC78-A64A-4E55-BD58-07EABAFBC98B @default.
- Q63957742 P304 Q63957742-B5C65ADA-3405-427A-9B6B-97E8BB9AD3A0 @default.
- Q63957742 P31 Q63957742-F5EE694A-342C-4275-B7F8-814D928E77C8 @default.
- Q63957742 P356 Q63957742-5602DBD3-DF5C-4742-8617-2DB8A9E6A3B3 @default.
- Q63957742 P433 Q63957742-46E5B3CB-FE6B-4391-907E-EEE1C045CFE0 @default.
- Q63957742 P478 Q63957742-2C7565F9-9AC0-4BA1-9523-D9C255888377 @default.
- Q63957742 P50 Q63957742-85CDB44C-1340-48D0-A2A7-6F35AC6A5821 @default.
- Q63957742 P577 Q63957742-83F24B81-9ACB-4702-8408-8F6F070600F7 @default.
- Q63957742 P356 PAC200274030489 @default.
- Q63957742 P1433 Q2425378 @default.
- Q63957742 P1476 "How to exploit ion-induced stress relaxation to grow thick c-BN films" @default.
- Q63957742 P2093 "H.-G. Boyen" @default.
- Q63957742 P2093 "N. Deyneka" @default.
- Q63957742 P2093 "P. Widmayer" @default.
- Q63957742 P2093 "P. Ziemann" @default.
- Q63957742 P304 "489-492" @default.
- Q63957742 P31 Q13442814 @default.
- Q63957742 P356 "10.1351/PAC200274030489" @default.
- Q63957742 P433 "3" @default.
- Q63957742 P478 "74" @default.
- Q63957742 P50 Q47888217 @default.
- Q63957742 P577 "2002-01-01T00:00:00Z" @default.