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- Q64449748 description "article scientifique publié en 2017" @default.
- Q64449748 description "im Dezember 2017 veröffentlichter wissenschaftlicher Artikel" @default.
- Q64449748 description "wetenschappelijk artikel" @default.
- Q64449748 description "наукова стаття, опублікована в грудні 2017" @default.
- Q64449748 name "Surface activated room-temperature bonding in Ar gas ambient for MEMS encapsulation" @default.
- Q64449748 name "Surface activated room-temperature bonding in Ar gas ambient for MEMS encapsulation" @default.
- Q64449748 type Item @default.
- Q64449748 label "Surface activated room-temperature bonding in Ar gas ambient for MEMS encapsulation" @default.
- Q64449748 label "Surface activated room-temperature bonding in Ar gas ambient for MEMS encapsulation" @default.
- Q64449748 prefLabel "Surface activated room-temperature bonding in Ar gas ambient for MEMS encapsulation" @default.
- Q64449748 prefLabel "Surface activated room-temperature bonding in Ar gas ambient for MEMS encapsulation" @default.
- Q64449748 P1433 Q64449748-F8685428-3512-4FE8-9DF2-073DCF097D98 @default.
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- Q64449748 P31 Q64449748-F5B100AB-822D-4BD2-8E66-E5BBD6CB370F @default.
- Q64449748 P356 Q64449748-B4074A6F-ABC5-4D89-80E9-B5BA6687641A @default.
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- Q64449748 P478 Q64449748-25A02687-4F21-4E86-A54E-EC213F5C4847 @default.
- Q64449748 P50 Q64449748-405D00E9-C97B-47FC-B29A-D2FBA99FF968 @default.
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- Q64449748 P577 Q64449748-A4805F6E-92A5-477E-85C1-42AC26946987 @default.
- Q64449748 P356 JJAP.57.02BA04 @default.
- Q64449748 P1433 Q2366671 @default.
- Q64449748 P1476 "Surface activated room-temperature bonding in Ar gas ambient for MEMS encapsulation" @default.
- Q64449748 P304 "02BA04" @default.
- Q64449748 P31 Q13442814 @default.
- Q64449748 P356 "10.7567/JJAP.57.02BA04" @default.
- Q64449748 P433 "2S1" @default.
- Q64449748 P478 "57" @default.
- Q64449748 P50 Q55950246 @default.
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- Q64449748 P50 Q64516142 @default.
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- Q64449748 P50 Q64516149 @default.
- Q64449748 P577 "2017-12-28T00:00:00Z" @default.