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- Q66692075 description "article scientifique publié en 2012" @default.
- Q66692075 description "scholarly article published June 2012" @default.
- Q66692075 description "wetenschappelijk artikel" @default.
- Q66692075 description "наукова стаття" @default.
- Q66692075 name "Ultrafast laser direct hard-mask writing for high performance inverted-pyramidal texturing of silicon" @default.
- Q66692075 name "Ultrafast laser direct hard-mask writing for high performance inverted-pyramidal texturing of silicon" @default.
- Q66692075 type Item @default.
- Q66692075 label "Ultrafast laser direct hard-mask writing for high performance inverted-pyramidal texturing of silicon" @default.
- Q66692075 label "Ultrafast laser direct hard-mask writing for high performance inverted-pyramidal texturing of silicon" @default.
- Q66692075 prefLabel "Ultrafast laser direct hard-mask writing for high performance inverted-pyramidal texturing of silicon" @default.
- Q66692075 prefLabel "Ultrafast laser direct hard-mask writing for high performance inverted-pyramidal texturing of silicon" @default.
- Q66692075 P1476 Q66692075-0148AB52-9954-4441-907A-EBBB2E16B925 @default.
- Q66692075 P2093 Q66692075-0FA83848-AF2A-412E-A174-1C867FC77E5E @default.
- Q66692075 P2093 Q66692075-26B8DB3B-91EC-45B1-A8D2-527F01BA3ED7 @default.
- Q66692075 P2093 Q66692075-38EAE5CC-1A9D-4F75-94BA-9285A82E3A9D @default.
- Q66692075 P2093 Q66692075-97DD239D-8595-45D2-938E-5034BAD74B9C @default.
- Q66692075 P31 Q66692075-D97701CC-B0F7-42F1-B93D-F7CE64372E0A @default.
- Q66692075 P356 Q66692075-B8EC7F9A-FCBC-4F80-A4FE-797A4F4CBD63 @default.
- Q66692075 P50 Q66692075-B16C771E-DA75-44F2-9FF4-D2E7B9A976F2 @default.
- Q66692075 P577 Q66692075-F3B2F86E-55EA-4148-9EAE-15CAA3FAD410 @default.
- Q66692075 P921 Q66692075-10D6E189-8743-45A4-9147-A007067064E8 @default.
- Q66692075 P356 PVSC.2012.6318029 @default.
- Q66692075 P1476 "Ultrafast laser direct hard-mask writing for high performance inverted-pyramidal texturing of silicon" @default.
- Q66692075 P2093 "K. Kumar" @default.
- Q66692075 P2093 "K.C. Lee" @default.
- Q66692075 P2093 "N.P. Kherani" @default.
- Q66692075 P2093 "P.R. Herman" @default.
- Q66692075 P31 Q13442814 @default.
- Q66692075 P356 "10.1109/PVSC.2012.6318029" @default.
- Q66692075 P50 Q66691589 @default.
- Q66692075 P577 "2012-06-01T00:00:00Z" @default.
- Q66692075 P921 Q110495620 @default.