Matches in Wikidata for { <http://www.wikidata.org/entity/Q7252868> ?p ?o ?g. }
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- Q7252868 description "fenomen de la distribució de la dosi d'exposició" @default.
- Q7252868 description "phenomenon in electron beam lithography that developed pattern is wider than scanned pattern" @default.
- Q7252868 name "Efecte de proximitat (litografia de feix d'electrons)" @default.
- Q7252868 name "proximity effect" @default.
- Q7252868 name "邻近效应（电子束曝光）" @default.
- Q7252868 name "邻近效应（电子束曝光）" @default.
- Q7252868 name "鄰近效應（電子束曝光）" @default.
- Q7252868 type Item @default.
- Q7252868 label "Efecte de proximitat (litografia de feix d'electrons)" @default.
- Q7252868 label "proximity effect" @default.
- Q7252868 label "邻近效应（电子束曝光）" @default.
- Q7252868 label "邻近效应（电子束曝光）" @default.
- Q7252868 label "鄰近效應（電子束曝光）" @default.
- Q7252868 altLabel "EBL" @default.
- Q7252868 prefLabel "Efecte de proximitat (litografia de feix d'electrons)" @default.
- Q7252868 prefLabel "proximity effect" @default.
- Q7252868 prefLabel "邻近效应（电子束曝光）" @default.
- Q7252868 prefLabel "邻近效应（电子束曝光）" @default.
- Q7252868 prefLabel "鄰近效應（電子束曝光）" @default.
- Q7252868 P10283 Q7252868-CCD9CFF2-6032-43C5-9457-B8D7953C5869 @default.
- Q7252868 P31 Q7252868-b617d04a-4577-c003-5835-f87b9d8016bd @default.
- Q7252868 P646 Q7252868-0A62B270-088C-4397-949E-2742549EB1D0 @default.
- Q7252868 P10283 "C2777953097" @default.
- Q7252868 P31 Q1293220 @default.
- Q7252868 P646 "/m/02vr949" @default.