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- Q74298505 description "article scientifique publié en 2002" @default.
- Q74298505 description "artículu científicu espublizáu en xunu de 2002" @default.
- Q74298505 description "scientific article published on 01 June 2002" @default.
- Q74298505 description "wetenschappelijk artikel" @default.
- Q74298505 description "наукова стаття, опублікована в червні 2002" @default.
- Q74298505 name "Atomic-precision multilayer coating of the first set of optics for an extreme-ultraviolet lithography prototype system" @default.
- Q74298505 name "Atomic-precision multilayer coating of the first set of optics for an extreme-ultraviolet lithography prototype system" @default.
- Q74298505 type Item @default.
- Q74298505 label "Atomic-precision multilayer coating of the first set of optics for an extreme-ultraviolet lithography prototype system" @default.
- Q74298505 label "Atomic-precision multilayer coating of the first set of optics for an extreme-ultraviolet lithography prototype system" @default.
- Q74298505 prefLabel "Atomic-precision multilayer coating of the first set of optics for an extreme-ultraviolet lithography prototype system" @default.
- Q74298505 prefLabel "Atomic-precision multilayer coating of the first set of optics for an extreme-ultraviolet lithography prototype system" @default.
- Q74298505 P1433 Q74298505-99B33124-B337-4E85-BA74-8626D34227FD @default.
- Q74298505 P1476 Q74298505-A08DC3A5-01DA-4884-B74C-CAE018DADD5A @default.
- Q74298505 P2093 Q74298505-0A4C33D0-E3DB-412D-9203-EAF746BB770A @default.
- Q74298505 P2093 Q74298505-31D97F9C-DAE7-4FC8-A5C0-0E295DFC041D @default.
- Q74298505 P2093 Q74298505-8631D18A-9E62-43A9-B7FD-840626F214C3 @default.
- Q74298505 P2093 Q74298505-8759E759-F6C8-4644-A088-0DEDC142FC36 @default.
- Q74298505 P2093 Q74298505-BCAB8F04-B5A8-4E27-B3BF-27126A6E1B36 @default.
- Q74298505 P2093 Q74298505-CCBF283C-89E6-4BF1-B4C0-BA66F50D23AC @default.
- Q74298505 P2093 Q74298505-D2997C47-B9E4-475A-B8EF-437F4A4EA680 @default.
- Q74298505 P2093 Q74298505-F193E0C8-1023-4B18-B6FC-F74F01573180 @default.
- Q74298505 P304 Q74298505-143CD5F0-AB27-420A-9762-6875C4259CCF @default.
- Q74298505 P31 Q74298505-5CBD6B00-2A61-47DA-AF0E-C8F3D73E4833 @default.
- Q74298505 P356 Q74298505-05284302-D520-462D-96AE-9189169A14BB @default.
- Q74298505 P407 Q74298505-E338259A-7FBD-4D8A-98B6-68342584E06A @default.
- Q74298505 P433 Q74298505-F4027AB8-C1EE-4AF3-AE62-95C3CB793AD9 @default.
- Q74298505 P478 Q74298505-1C5B2DFD-B7CD-440F-BEDE-C07B0301E4A4 @default.
- Q74298505 P577 Q74298505-9CC74BA4-481F-4376-86EF-07DD510D6A63 @default.
- Q74298505 P698 Q74298505-635E4836-D886-4E61-A0AC-5B31B7B3687D @default.
- Q74298505 P819 Q74298505-F6279946-BBDB-4BC8-9FFE-1A6D0079B2F5 @default.
- Q74298505 P356 AO.41.003262 @default.
- Q74298505 P698 12064411 @default.
- Q74298505 P1433 Q4781557 @default.
- Q74298505 P1476 "Atomic-precision multilayer coating of the first set of optics for an extreme-ultraviolet lithography prototype system" @default.
- Q74298505 P2093 "Christopher C Walton" @default.
- Q74298505 P2093 "Claude Montcalm" @default.
- Q74298505 P2093 "Eberhard Spiller" @default.
- Q74298505 P2093 "James A Folta" @default.
- Q74298505 P2093 "Marco Wedowski" @default.
- Q74298505 P2093 "Mark A Schmidt" @default.
- Q74298505 P2093 "R Frederick Grabner" @default.
- Q74298505 P2093 "Russell M Hudyma" @default.
- Q74298505 P304 "3262-3269" @default.
- Q74298505 P31 Q13442814 @default.
- Q74298505 P356 "10.1364/AO.41.003262" @default.
- Q74298505 P407 Q1860 @default.
- Q74298505 P433 "16" @default.
- Q74298505 P478 "41" @default.
- Q74298505 P577 "2002-06-01T00:00:00Z" @default.
- Q74298505 P698 "12064411" @default.
- Q74298505 P819 "2002ApOpt..41.3262M" @default.