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- Q74555498 description "artículu científicu espublizáu en marzu de 1995" @default.
- Q74555498 description "im März 1995 veröffentlichter wissenschaftlicher Artikel" @default.
- Q74555498 description "scientific article published on 01 March 1995" @default.
- Q74555498 description "wetenschappelijk artikel" @default.
- Q74555498 description "наукова стаття, опублікована в березні 1995" @default.
- Q74555498 name "Small free energy barrier and postdesorption collisions: The keys towards the understanding of reactive ion etching of silicon" @default.
- Q74555498 name "Small free energy barrier and postdesorption collisions: The keys towards the understanding of reactive ion etching of silicon" @default.
- Q74555498 type Item @default.
- Q74555498 label "Small free energy barrier and postdesorption collisions: The keys towards the understanding of reactive ion etching of silicon" @default.
- Q74555498 label "Small free energy barrier and postdesorption collisions: The keys towards the understanding of reactive ion etching of silicon" @default.
- Q74555498 prefLabel "Small free energy barrier and postdesorption collisions: The keys towards the understanding of reactive ion etching of silicon" @default.
- Q74555498 prefLabel "Small free energy barrier and postdesorption collisions: The keys towards the understanding of reactive ion etching of silicon" @default.
- Q74555498 P1433 Q74555498-DAFE2DB9-88E6-4F96-B323-C0C827A8A75B @default.
- Q74555498 P1476 Q74555498-ECFAB099-9EA5-4FA3-B5AC-28668E0684A8 @default.
- Q74555498 P2093 Q74555498-3B518A6F-7721-4266-BF30-6A4FD5CAC221 @default.
- Q74555498 P2860 Q74555498-30CE022B-CFC4-4A92-B9A3-102814D71AE3 @default.
- Q74555498 P2860 Q74555498-36558EE1-4F73-49AB-955C-4136C04337EF @default.
- Q74555498 P2860 Q74555498-3A2DEC56-B739-4C15-B465-E92C62FFDB04 @default.
- Q74555498 P2860 Q74555498-9BBA0A84-560F-4F43-9D38-C5B5BD82357D @default.
- Q74555498 P2860 Q74555498-DFFAB12B-374B-491C-895E-437B11925D7F @default.
- Q74555498 P2860 Q74555498-E03D9EFD-0148-4DB4-8B38-DAA7DD524F73 @default.
- Q74555498 P304 Q74555498-641D9D43-CF03-4A44-9ACB-2016115AB982 @default.
- Q74555498 P31 Q74555498-50CDDD95-FC0C-4FBB-82B4-18C2BF742017 @default.
- Q74555498 P356 Q74555498-D3EBA6E5-15B2-4181-BE4C-A6321C6D4FF1 @default.
- Q74555498 P407 Q74555498-0A9A6080-F8A3-45A2-888D-12C4FE7A3159 @default.
- Q74555498 P433 Q74555498-F66EB289-C522-4F33-9636-053366465D5A @default.
- Q74555498 P478 Q74555498-D3F77E9A-E2AA-4219-8719-97FCF48A6B56 @default.
- Q74555498 P577 Q74555498-3A065F21-8FD2-4132-A1F1-6D961B2428F9 @default.
- Q74555498 P698 Q74555498-82DDA21B-A4A9-40FE-A48A-2784E1AC44DD @default.
- Q74555498 P356 PHYSREVLETT.74.1879 @default.
- Q74555498 P698 10057780 @default.
- Q74555498 P1433 Q2018386 @default.
- Q74555498 P1476 "Small free energy barrier and postdesorption collisions: The keys towards the understanding of reactive ion etching of silicon" @default.
- Q74555498 P2093 "Feil H" @default.
- Q74555498 P2860 Q21698177 @default.
- Q74555498 P2860 Q29040056 @default.
- Q74555498 P2860 Q56066346 @default.
- Q74555498 P2860 Q57569060 @default.
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- Q74555498 P2860 Q74516992 @default.
- Q74555498 P304 "1879-1882" @default.
- Q74555498 P31 Q13442814 @default.
- Q74555498 P356 "10.1103/PHYSREVLETT.74.1879" @default.
- Q74555498 P407 Q1860 @default.
- Q74555498 P433 "10" @default.
- Q74555498 P478 "74" @default.
- Q74555498 P577 "1995-03-01T00:00:00Z" @default.
- Q74555498 P698 "10057780" @default.