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- Q74571343 description "article scientifique publié en 1996" @default.
- Q74571343 description "artículu científicu espublizáu en setiembre de 1996" @default.
- Q74571343 description "bài báo khoa học" @default.
- Q74571343 description "im September 1996 veröffentlichter wissenschaftlicher Artikel" @default.
- Q74571343 description "scientific article published on 01 September 1996" @default.
- Q74571343 description "wetenschappelijk artikel" @default.
- Q74571343 description "наукова стаття, опублікована у вересні 1996" @default.
- Q74571343 name "Gas-Surface Dynamics and Profile Evolution during Etching of Silicon" @default.
- Q74571343 name "Gas-Surface Dynamics and Profile Evolution during Etching of Silicon" @default.
- Q74571343 type Item @default.
- Q74571343 label "Gas-Surface Dynamics and Profile Evolution during Etching of Silicon" @default.
- Q74571343 label "Gas-Surface Dynamics and Profile Evolution during Etching of Silicon" @default.
- Q74571343 prefLabel "Gas-Surface Dynamics and Profile Evolution during Etching of Silicon" @default.
- Q74571343 prefLabel "Gas-Surface Dynamics and Profile Evolution during Etching of Silicon" @default.
- Q74571343 P1433 Q74571343-69B3AACF-D931-4F88-8941-9F403E9C6A9C @default.
- Q74571343 P1476 Q74571343-71C2DCAC-0FC8-48E6-A3A5-52686CD2FBFB @default.
- Q74571343 P2093 Q74571343-22F4EE60-CE14-490D-92CA-14C49664490D @default.
- Q74571343 P2093 Q74571343-7F4A3017-FA64-46DF-BF73-1925B75560AD @default.
- Q74571343 P2093 Q74571343-8BC5E851-BD07-4972-8990-77C7409F477C @default.
- Q74571343 P2093 Q74571343-D7594458-053E-44F4-A888-298181973C73 @default.
- Q74571343 P2093 Q74571343-D92B7B42-1E90-4994-9EDF-8CC7075D0A7F @default.
- Q74571343 P2093 Q74571343-DB017DFC-2689-4E07-97E2-2BB58D639306 @default.
- Q74571343 P2860 Q74571343-5C1AAB2D-5921-46AA-A329-BA32EEB12952 @default.
- Q74571343 P304 Q74571343-EFFAD2E0-9778-410C-8A14-97923024B900 @default.
- Q74571343 P31 Q74571343-7393C9FC-4E60-430C-81D8-8043D71B8CB5 @default.
- Q74571343 P356 Q74571343-22C994C7-42AE-4E77-A4D9-D973392C1E75 @default.
- Q74571343 P407 Q74571343-265A2D0A-B64C-46CE-B907-200F60D58830 @default.
- Q74571343 P433 Q74571343-97848025-EE35-426A-96DC-2489276BB57E @default.
- Q74571343 P478 Q74571343-9F06B6B0-1B48-46B8-810A-D1556AB9AB39 @default.
- Q74571343 P577 Q74571343-D18B6C7E-50C8-41E5-81F6-EB1BA7E47DCA @default.
- Q74571343 P698 Q74571343-3891EE48-F2ED-4E9A-8EDA-757F02D071E4 @default.
- Q74571343 P356 PHYSREVLETT.77.3049 @default.
- Q74571343 P698 10062118 @default.
- Q74571343 P1433 Q2018386 @default.
- Q74571343 P1476 "Gas-Surface Dynamics and Profile Evolution during Etching of Silicon" @default.
- Q74571343 P2093 "Anderson CM" @default.
- Q74571343 P2093 "Giapis KP" @default.
- Q74571343 P2093 "Gordon J" @default.
- Q74571343 P2093 "Hwang GS" @default.
- Q74571343 P2093 "Minton TK" @default.
- Q74571343 P2093 "Moore TA" @default.
- Q74571343 P2860 Q74510481 @default.
- Q74571343 P304 "3049-3052" @default.
- Q74571343 P31 Q13442814 @default.
- Q74571343 P356 "10.1103/PHYSREVLETT.77.3049" @default.
- Q74571343 P407 Q1860 @default.
- Q74571343 P433 "14" @default.
- Q74571343 P478 "77" @default.
- Q74571343 P577 "1996-09-01T00:00:00Z" @default.
- Q74571343 P698 "10062118" @default.