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- Q80406420 description "article scientifique publié en 2005" @default.
- Q80406420 description "artículu científicu espublizáu en xunetu de 2005" @default.
- Q80406420 description "im Juli 2005 veröffentlichter wissenschaftlicher Artikel" @default.
- Q80406420 description "scientific article published on 21 July 2005" @default.
- Q80406420 description "wetenschappelijk artikel" @default.
- Q80406420 description "наукова стаття, опублікована в липні 2005" @default.
- Q80406420 name "Parasitic ion-implantation produced by a Kaufman-type ion source used for planar etching of surfaces" @default.
- Q80406420 name "Parasitic ion-implantation produced by a Kaufman-type ion source used for planar etching of surfaces" @default.
- Q80406420 type Item @default.
- Q80406420 label "Parasitic ion-implantation produced by a Kaufman-type ion source used for planar etching of surfaces" @default.
- Q80406420 label "Parasitic ion-implantation produced by a Kaufman-type ion source used for planar etching of surfaces" @default.
- Q80406420 prefLabel "Parasitic ion-implantation produced by a Kaufman-type ion source used for planar etching of surfaces" @default.
- Q80406420 prefLabel "Parasitic ion-implantation produced by a Kaufman-type ion source used for planar etching of surfaces" @default.
- Q80406420 P1433 Q80406420-FB656C8B-4209-47AC-A139-E1AB22D6A08C @default.
- Q80406420 P1476 Q80406420-6DF2D150-0ADD-426A-A421-0BEC03168C88 @default.
- Q80406420 P2093 Q80406420-45F664E2-0B15-431D-9D0B-AF024B4AF5C3 @default.
- Q80406420 P2093 Q80406420-ED4416B1-40E2-4687-BCCA-5B3F08601DE1 @default.
- Q80406420 P2888 Q80406420-460B0C94-2BA5-4C90-A3B8-B0808B9365D4 @default.
- Q80406420 P304 Q80406420-15DDD577-4CFC-49EC-B5BB-3E974AA9414D @default.
- Q80406420 P31 Q80406420-9689F445-FC3F-4566-A320-ACACA96AAD24 @default.
- Q80406420 P356 Q80406420-B161F4C3-365C-4902-82A7-93A824095D61 @default.
- Q80406420 P407 Q80406420-CD46AE88-608C-4BE0-B971-3B73894EFA43 @default.
- Q80406420 P433 Q80406420-1722DB0C-BEBB-4DC6-B06A-9F7CC7F5E318 @default.
- Q80406420 P478 Q80406420-A8BF873E-38E3-43BE-8FA9-5AE8D78FC2D6 @default.
- Q80406420 P577 Q80406420-70C78C57-41FA-4CF6-BFE5-64246CBCA073 @default.
- Q80406420 P698 Q80406420-A28F4642-CC9B-4BD0-BA86-9F356ECDE98A @default.
- Q80406420 P356 S00216-005-3374-2 @default.
- Q80406420 P698 16034617 @default.
- Q80406420 P1433 Q2845280 @default.
- Q80406420 P1476 "Parasitic ion-implantation produced by a Kaufman-type ion source used for planar etching of surfaces" @default.
- Q80406420 P2093 "Alex von Bohlen" @default.
- Q80406420 P2093 "Reinhold Klockenkämper" @default.
- Q80406420 P2888 s00216-005-3374-2 @default.
- Q80406420 P304 "1975-1980" @default.
- Q80406420 P31 Q13442814 @default.
- Q80406420 P356 "10.1007/S00216-005-3374-2" @default.
- Q80406420 P407 Q1860 @default.
- Q80406420 P433 "8" @default.
- Q80406420 P478 "382" @default.
- Q80406420 P577 "2005-07-21T00:00:00Z" @default.
- Q80406420 P698 "16034617" @default.