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- Q81325850 description "artículu científicu espublizáu en xunetu de 2005" @default.
- Q81325850 description "scientific article published on 01 July 2005" @default.
- Q81325850 description "wetenschappelijk artikel" @default.
- Q81325850 description "наукова стаття, опублікована в липні 2005" @default.
- Q81325850 name "Synthesis of C-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni" @default.
- Q81325850 name "Synthesis of C-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni" @default.
- Q81325850 type Item @default.
- Q81325850 label "Synthesis of C-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni" @default.
- Q81325850 label "Synthesis of C-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni" @default.
- Q81325850 prefLabel "Synthesis of C-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni" @default.
- Q81325850 prefLabel "Synthesis of C-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni" @default.
- Q81325850 P1433 Q81325850-14F41CF8-7025-4F41-97F6-3EC075256749 @default.
- Q81325850 P1476 Q81325850-E187BDDC-9E0B-4A49-9C6E-BF7E23B7F3FB @default.
- Q81325850 P2093 Q81325850-274A4C9C-F0EC-4254-869E-C4F54260D9DB @default.
- Q81325850 P2093 Q81325850-363C8DDB-8D4E-4ABB-B0A3-22DFA89E2163 @default.
- Q81325850 P2093 Q81325850-8AC29FAD-7317-4AD9-A82F-BAF8F34E7CB5 @default.
- Q81325850 P2093 Q81325850-A264F1E0-E10F-40BA-A5E7-8B5F5C128049 @default.
- Q81325850 P2093 Q81325850-E9A8E6B1-E2F9-4145-9FBF-4623B0283619 @default.
- Q81325850 P304 Q81325850-E0ED6E12-3FF5-45AF-948A-2AE3DF4E5879 @default.
- Q81325850 P31 Q81325850-2574F3D1-FC3A-451B-954B-FEB49FE78A74 @default.
- Q81325850 P356 Q81325850-4F9FA06C-9358-4D4E-A210-C238D01A7F61 @default.
- Q81325850 P433 Q81325850-CB98AA8A-01AF-4FBE-BF00-5F0E2EE6FF63 @default.
- Q81325850 P478 Q81325850-A8F5059D-C56E-4111-A56A-06C8BE46FF04 @default.
- Q81325850 P577 Q81325850-95AE5C9C-FE24-4CFE-B318-E2651DFDC1F0 @default.
- Q81325850 P698 Q81325850-6C07F1E5-B0EC-4EB1-8AB5-29C8EB0806AD @default.
- Q81325850 P921 Q81325850-7D013730-C3AF-4A4C-A633-070AE546ECD5 @default.
- Q81325850 P356 TUFFC.2005.1504003 @default.
- Q81325850 P698 16212256 @default.
- Q81325850 P1433 Q2465573 @default.
- Q81325850 P1476 "Synthesis of C-axis-oriented AlN thin films on high-conducting layers: Al, Mo, Ti, TiN, and Ni" @default.
- Q81325850 P2093 "Fredrik Engelmark" @default.
- Q81325850 P2093 "Gonzalo F Iriarte" @default.
- Q81325850 P2093 "Ilia V Katardjiev" @default.
- Q81325850 P2093 "Johan Bjurström" @default.
- Q81325850 P2093 "Jörgen Westlinder" @default.
- Q81325850 P304 "1170-1174" @default.
- Q81325850 P31 Q13442814 @default.
- Q81325850 P356 "10.1109/TUFFC.2005.1504003" @default.
- Q81325850 P433 "7" @default.
- Q81325850 P478 "52" @default.
- Q81325850 P577 "2005-07-01T00:00:00Z" @default.
- Q81325850 P698 "16212256" @default.
- Q81325850 P921 Q1137203 @default.