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- Q82741192 description "article scientifique publié en 2011" @default.
- Q82741192 description "artículu científicu espublizáu en payares de 2011" @default.
- Q82741192 description "scientific article published on 01 November 2011" @default.
- Q82741192 description "wetenschappelijk artikel" @default.
- Q82741192 description "наукова стаття, опублікована в листопаді 2011" @default.
- Q82741192 name "Note: detection of micro-cracks in the interlayer dielectric film by the stress based light scattering method" @default.
- Q82741192 name "Note: detection of micro-cracks in the interlayer dielectric film by the stress based light scattering method" @default.
- Q82741192 type Item @default.
- Q82741192 label "Note: detection of micro-cracks in the interlayer dielectric film by the stress based light scattering method" @default.
- Q82741192 label "Note: detection of micro-cracks in the interlayer dielectric film by the stress based light scattering method" @default.
- Q82741192 prefLabel "Note: detection of micro-cracks in the interlayer dielectric film by the stress based light scattering method" @default.
- Q82741192 prefLabel "Note: detection of micro-cracks in the interlayer dielectric film by the stress based light scattering method" @default.
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- Q82741192 P1476 Q82741192-98F73C3D-2085-4240-B536-28FAFA560D43 @default.
- Q82741192 P2093 Q82741192-C4C3C3F3-4F4A-4A79-BB01-E5CB215C6BB0 @default.
- Q82741192 P2093 Q82741192-C6C1E0AB-2C91-429D-AF66-63EECD44D25A @default.
- Q82741192 P304 Q82741192-DD3FDD7F-10CA-40B5-8B6F-AE6F02CBE039 @default.
- Q82741192 P31 Q82741192-E281E85B-F86F-43A4-9B9A-4E1C7A18A078 @default.
- Q82741192 P356 Q82741192-4D942590-47E8-4363-A08F-D677D444AAE3 @default.
- Q82741192 P433 Q82741192-9907C30D-0406-43E4-9399-062E0B09D736 @default.
- Q82741192 P478 Q82741192-2E0CE34E-7922-4E51-A11E-CFBE1D13EFE3 @default.
- Q82741192 P577 Q82741192-7B935D0A-9CA4-47BE-90B4-3B2D38E6DEB7 @default.
- Q82741192 P698 Q82741192-903049AA-6AED-46E6-8F4D-BE709C08E252 @default.
- Q82741192 P356 1.3660812 @default.
- Q82741192 P698 22129019 @default.
- Q82741192 P1433 Q2364002 @default.
- Q82741192 P1476 "Note: detection of micro-cracks in the interlayer dielectric film by the stress based light scattering method" @default.
- Q82741192 P2093 "Kazufumi Sakai" @default.
- Q82741192 P2093 "Kazuhiro Nonaka" @default.
- Q82741192 P304 "116103" @default.
- Q82741192 P31 Q13442814 @default.
- Q82741192 P356 "10.1063/1.3660812" @default.
- Q82741192 P433 "11" @default.
- Q82741192 P478 "82" @default.
- Q82741192 P577 "2011-11-01T00:00:00Z" @default.
- Q82741192 P698 "22129019" @default.