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- Q82834582 description "article scientifique publié en 2006" @default.
- Q82834582 description "artículu científicu espublizáu en marzu de 2006" @default.
- Q82834582 description "scientific article published on 01 March 2006" @default.
- Q82834582 description "wetenschappelijk artikel" @default.
- Q82834582 description "наукова стаття, опублікована в березні 2006" @default.
- Q82834582 name "Efficient finite-element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films" @default.
- Q82834582 name "Efficient finite-element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films" @default.
- Q82834582 type Item @default.
- Q82834582 label "Efficient finite-element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films" @default.
- Q82834582 label "Efficient finite-element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films" @default.
- Q82834582 prefLabel "Efficient finite-element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films" @default.
- Q82834582 prefLabel "Efficient finite-element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films" @default.
- Q82834582 P1433 Q82834582-CE49A29D-A5D3-42C8-96E6-97597BB81E5E @default.
- Q82834582 P1476 Q82834582-70CDFB3F-206C-4878-BEBE-20011E3B25C8 @default.
- Q82834582 P2093 Q82834582-00D8F50A-ACEF-40F8-B87E-1AB6D04EB999 @default.
- Q82834582 P2093 Q82834582-245F5261-CAB1-47D4-A219-7807D3AF5923 @default.
- Q82834582 P2093 Q82834582-A7D5F416-80E2-48EE-85A3-43B623FD82C5 @default.
- Q82834582 P2093 Q82834582-B63D555F-38DD-4030-9C83-1E9CFFF17523 @default.
- Q82834582 P304 Q82834582-2F90D663-73DC-410C-B38D-7D444108247A @default.
- Q82834582 P31 Q82834582-1108C224-F52E-4274-8FD4-742C6FEF313C @default.
- Q82834582 P356 Q82834582-459DEB38-4BAB-43B9-9BD2-137A71CE0374 @default.
- Q82834582 P433 Q82834582-4F3B3FDF-ADDE-43B1-986B-3CDB7982C91B @default.
- Q82834582 P478 Q82834582-046E8C2F-4C19-49ED-A8B9-123FAE39399F @default.
- Q82834582 P577 Q82834582-9456B57D-A350-4D1A-BBF5-BF4BD72EE323 @default.
- Q82834582 P698 Q82834582-89718979-84BF-4B23-8596-60D3DFCC9341 @default.
- Q82834582 P921 Q82834582-7408D911-588A-455C-9105-4CF63044F32E @default.
- Q82834582 P356 JOSAA.23.000638 @default.
- Q82834582 P698 16539061 @default.
- Q82834582 P1433 Q6296174 @default.
- Q82834582 P1476 "Efficient finite-element, Green's function approach for critical-dimension metrology of three-dimensional gratings on multilayer films" @default.
- Q82834582 P2093 "Guangwei Li" @default.
- Q82834582 P2093 "Hanyou Chu" @default.
- Q82834582 P2093 "Jon Opsal" @default.
- Q82834582 P2093 "Yia-Chung Chang" @default.
- Q82834582 P304 "638-645" @default.
- Q82834582 P31 Q13442814 @default.
- Q82834582 P356 "10.1364/JOSAA.23.000638" @default.
- Q82834582 P433 "3" @default.
- Q82834582 P478 "23" @default.
- Q82834582 P577 "2006-03-01T00:00:00Z" @default.
- Q82834582 P698 "16539061" @default.
- Q82834582 P921 Q394 @default.