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- Q82923346 description "article scientifique publié en 2010" @default.
- Q82923346 description "artículu científicu espublizáu n'ochobre de 2010" @default.
- Q82923346 description "im Oktober 2010 veröffentlichter wissenschaftlicher Artikel" @default.
- Q82923346 description "scientific article published on 01 October 2010" @default.
- Q82923346 description "wetenschappelijk artikel" @default.
- Q82923346 description "наукова стаття, опублікована в жовтні 2010" @default.
- Q82923346 name "Impacts of cost functions on inverse lithography patterning" @default.
- Q82923346 name "Impacts of cost functions on inverse lithography patterning" @default.
- Q82923346 type Item @default.
- Q82923346 label "Impacts of cost functions on inverse lithography patterning" @default.
- Q82923346 label "Impacts of cost functions on inverse lithography patterning" @default.
- Q82923346 prefLabel "Impacts of cost functions on inverse lithography patterning" @default.
- Q82923346 prefLabel "Impacts of cost functions on inverse lithography patterning" @default.
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- Q82923346 P304 Q82923346-DBB7FB56-1472-4DA1-8B61-68FD7CD0B54F @default.
- Q82923346 P31 Q82923346-9D33C3F1-6A63-43A3-B69E-9E8AC4E8586A @default.
- Q82923346 P356 Q82923346-198E419B-CA77-4AFD-B34F-9768A48516B5 @default.
- Q82923346 P433 Q82923346-5AD53340-7814-4F1D-A461-FE4E54955CC2 @default.
- Q82923346 P478 Q82923346-065CD090-F6AF-4D0A-9656-426C7AECD126 @default.
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- Q82923346 P698 Q82923346-7913E89A-E038-4115-BF93-F87AA5FBA9F3 @default.
- Q82923346 P356 OE.18.023331 @default.
- Q82923346 P698 21164674 @default.
- Q82923346 P1104 "+12" @default.
- Q82923346 P1433 Q3354459 @default.
- Q82923346 P1476 "Impacts of cost functions on inverse lithography patterning" @default.
- Q82923346 P2093 "Jue-Chin Yu" @default.
- Q82923346 P2093 "Peichen Yu" @default.
- Q82923346 P304 "23331-23342" @default.
- Q82923346 P31 Q13442814 @default.
- Q82923346 P356 "10.1364/OE.18.023331" @default.
- Q82923346 P433 "22" @default.
- Q82923346 P478 "18" @default.
- Q82923346 P577 "2010-10-01T00:00:00Z" @default.
- Q82923346 P698 "21164674" @default.