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- Q82951643 description "artículu científicu espublizáu n'avientu de 2008" @default.
- Q82951643 description "im Dezember 2008 veröffentlichter wissenschaftlicher Artikel" @default.
- Q82951643 description "scientific article published on 01 December 2008" @default.
- Q82951643 description "wetenschappelijk artikel" @default.
- Q82951643 description "наукова стаття, опублікована в грудні 2008" @default.
- Q82951643 name "Extreme-ultraviolet microexposure tool at 0.5 NA for sub-16 nm lithography" @default.
- Q82951643 name "Extreme-ultraviolet microexposure tool at 0.5 NA for sub-16 nm lithography" @default.
- Q82951643 type Item @default.
- Q82951643 label "Extreme-ultraviolet microexposure tool at 0.5 NA for sub-16 nm lithography" @default.
- Q82951643 label "Extreme-ultraviolet microexposure tool at 0.5 NA for sub-16 nm lithography" @default.
- Q82951643 prefLabel "Extreme-ultraviolet microexposure tool at 0.5 NA for sub-16 nm lithography" @default.
- Q82951643 prefLabel "Extreme-ultraviolet microexposure tool at 0.5 NA for sub-16 nm lithography" @default.
- Q82951643 P1433 Q82951643-F31699D4-1A59-462D-91B9-C0B437CA85DC @default.
- Q82951643 P1476 Q82951643-A48A8EC0-8EFA-41FC-A5E9-7693320317E9 @default.
- Q82951643 P2093 Q82951643-2DBCDB02-1686-4065-884E-0F02F5FD7883 @default.
- Q82951643 P2093 Q82951643-4F139AF9-F01C-4F44-902E-714287BDF2F2 @default.
- Q82951643 P2093 Q82951643-7B8D8644-E490-4DA5-A931-78E788A1369C @default.
- Q82951643 P2093 Q82951643-C7DD97E9-E147-4AAC-A36E-6DE09804E5B1 @default.
- Q82951643 P304 Q82951643-7F408572-6B0F-4FE0-B35F-34999B441784 @default.
- Q82951643 P31 Q82951643-94DF24A4-49C8-46C9-871A-DBB4F0BB8D39 @default.
- Q82951643 P356 Q82951643-368EE24E-BEF3-4B45-B07A-84F1809263B2 @default.
- Q82951643 P433 Q82951643-AFB346DA-69C8-456B-A8DA-6398AF30292E @default.
- Q82951643 P478 Q82951643-550DC637-B96F-45BB-A3C4-77C1967B9D88 @default.
- Q82951643 P577 Q82951643-B54FA999-BE1F-4870-90B8-2BEB731603ED @default.
- Q82951643 P698 Q82951643-4E2829CA-BF3E-483A-88D3-3C8699BD5516 @default.
- Q82951643 P356 OL.33.002995 @default.
- Q82951643 P698 19079518 @default.
- Q82951643 P1433 Q7098918 @default.
- Q82951643 P1476 "Extreme-ultraviolet microexposure tool at 0.5 NA for sub-16 nm lithography" @default.
- Q82951643 P2093 "Michael Goldstein" @default.
- Q82951643 P2093 "Patrick Naulleau" @default.
- Q82951643 P2093 "Russ Hudyma" @default.
- Q82951643 P2093 "Stefan Wurm" @default.
- Q82951643 P304 "2995-2997" @default.
- Q82951643 P31 Q13442814 @default.
- Q82951643 P356 "10.1364/OL.33.002995" @default.
- Q82951643 P433 "24" @default.
- Q82951643 P478 "33" @default.
- Q82951643 P577 "2008-12-01T00:00:00Z" @default.
- Q82951643 P698 "19079518" @default.