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- Q83094023 description "article scientifique publié en 2010" @default.
- Q83094023 description "artículu científicu espublizáu n'avientu de 2010" @default.
- Q83094023 description "scientific article published on 01 December 2010" @default.
- Q83094023 description "wetenschappelijk artikel" @default.
- Q83094023 description "наукова стаття, опублікована в грудні 2010" @default.
- Q83094023 name "Effect of tip shape on line edge roughness measurement based on atomic force microscopy" @default.
- Q83094023 name "Effect of tip shape on line edge roughness measurement based on atomic force microscopy" @default.
- Q83094023 type Item @default.
- Q83094023 label "Effect of tip shape on line edge roughness measurement based on atomic force microscopy" @default.
- Q83094023 label "Effect of tip shape on line edge roughness measurement based on atomic force microscopy" @default.
- Q83094023 prefLabel "Effect of tip shape on line edge roughness measurement based on atomic force microscopy" @default.
- Q83094023 prefLabel "Effect of tip shape on line edge roughness measurement based on atomic force microscopy" @default.
- Q83094023 P1433 Q83094023-AC6543AE-4C2E-4B62-A3C5-0EE634780B7A @default.
- Q83094023 P1476 Q83094023-28643603-361A-44A4-8BB0-D7F24FF1659B @default.
- Q83094023 P2093 Q83094023-A95FF856-AFA4-4031-9C0D-D3E79B7A702F @default.
- Q83094023 P2093 Q83094023-F1D4E73B-E032-4AD0-87E4-18AB32AF92FF @default.
- Q83094023 P2093 Q83094023-F91DC8BF-EC11-4CBA-B575-D9E1587BBA63 @default.
- Q83094023 P304 Q83094023-F5A47041-717B-4582-975D-B83BE6747A72 @default.
- Q83094023 P31 Q83094023-88A1E5E7-E685-4168-B26D-CC5410FBD3D3 @default.
- Q83094023 P356 Q83094023-A1563167-36A9-4374-9019-2856A6E33BBB @default.
- Q83094023 P433 Q83094023-664F0B95-0ECF-4E44-92DD-44DBF8E18899 @default.
- Q83094023 P478 Q83094023-468F7EFB-4B40-4D18-8AFE-DB20B9E89C14 @default.
- Q83094023 P577 Q83094023-1C00B69D-4B82-4301-94A9-15DF0C921955 @default.
- Q83094023 P698 Q83094023-19E3E46C-3D27-4CC7-9F84-F83EF227B8FF @default.
- Q83094023 P356 1.3518973 @default.
- Q83094023 P698 21198028 @default.
- Q83094023 P1433 Q2364002 @default.
- Q83094023 P1476 "Effect of tip shape on line edge roughness measurement based on atomic force microscopy" @default.
- Q83094023 P2093 "Fei Wang" @default.
- Q83094023 P2093 "Ning Li" @default.
- Q83094023 P2093 "Xuezeng Zhao" @default.
- Q83094023 P304 "123703" @default.
- Q83094023 P31 Q13442814 @default.
- Q83094023 P356 "10.1063/1.3518973" @default.
- Q83094023 P433 "12" @default.
- Q83094023 P478 "81" @default.
- Q83094023 P577 "2010-12-01T00:00:00Z" @default.
- Q83094023 P698 "21198028" @default.