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- Q83161447 description "article scientifique publié en 2012" @default.
- Q83161447 description "artículu científicu espublizáu en xineru de 2012" @default.
- Q83161447 description "im Januar 2012 veröffentlichter wissenschaftlicher Artikel" @default.
- Q83161447 description "scientific article published on 17 January 2012" @default.
- Q83161447 description "wetenschappelijk artikel" @default.
- Q83161447 description "наукова стаття, опублікована в січні 2012" @default.
- Q83161447 name "Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin film" @default.
- Q83161447 name "Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin film" @default.
- Q83161447 type Item @default.
- Q83161447 label "Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin film" @default.
- Q83161447 label "Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin film" @default.
- Q83161447 prefLabel "Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin film" @default.
- Q83161447 prefLabel "Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin film" @default.
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- Q83161447 P1476 Q83161447-51F3C7BE-93AC-4DF2-B7AE-6B72B505C0C4 @default.
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- Q83161447 P304 Q83161447-9A75B030-DF5D-41F8-A0EE-5BCB29AE02B4 @default.
- Q83161447 P31 Q83161447-99630A0F-64A8-4D9B-9FDB-535FF020A1A7 @default.
- Q83161447 P356 Q83161447-9CC396EC-2FDF-48D4-B69D-11424FD00A43 @default.
- Q83161447 P433 Q83161447-4F7540E0-24B1-46CA-A121-326244304093 @default.
- Q83161447 P478 Q83161447-63667285-207F-445E-80CD-C285F0F83087 @default.
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- Q83161447 P356 NN204210U @default.
- Q83161447 P698 22211667 @default.
- Q83161447 P1104 "+6" @default.
- Q83161447 P1433 Q2819067 @default.
- Q83161447 P1476 "Nanoscale noncontact subsurface investigations of mechanical and optical properties of nanoporous low-k material thin film" @default.
- Q83161447 P2093 "Adil Ayouch" @default.
- Q83161447 P2093 "Alexey M Lomonosov" @default.
- Q83161447 P2093 "Gwenaelle Vaudel" @default.
- Q83161447 P2093 "Larry Zhao" @default.
- Q83161447 P2093 "Mikhail R Baklanov" @default.
- Q83161447 P2093 "Patrick Verdonck" @default.
- Q83161447 P2093 "Vitalyi E Gusev" @default.
- Q83161447 P304 "1410-1415" @default.
- Q83161447 P31 Q13442814 @default.
- Q83161447 P356 "10.1021/NN204210U" @default.
- Q83161447 P433 "2" @default.
- Q83161447 P478 "6" @default.
- Q83161447 P50 Q51704709 @default.
- Q83161447 P577 "2012-01-17T00:00:00Z" @default.
- Q83161447 P698 "22211667" @default.
- Q83161447 P921 Q1137203 @default.