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- Q84258522 description "artículu científicu espublizáu en mayu de 2010" @default.
- Q84258522 description "im Mai 2010 veröffentlichter wissenschaftlicher Artikel" @default.
- Q84258522 description "scientific article published on 19 May 2010" @default.
- Q84258522 description "wetenschappelijk artikel" @default.
- Q84258522 description "наукова стаття, опублікована в травні 2010" @default.
- Q84258522 name "Automated characterization of bending and expansion of a lattice of a Si substrate near a SiGe/Si interface by using split HOLZ line patterns" @default.
- Q84258522 name "Automated characterization of bending and expansion of a lattice of a Si substrate near a SiGe/Si interface by using split HOLZ line patterns" @default.
- Q84258522 type Item @default.
- Q84258522 label "Automated characterization of bending and expansion of a lattice of a Si substrate near a SiGe/Si interface by using split HOLZ line patterns" @default.
- Q84258522 label "Automated characterization of bending and expansion of a lattice of a Si substrate near a SiGe/Si interface by using split HOLZ line patterns" @default.
- Q84258522 prefLabel "Automated characterization of bending and expansion of a lattice of a Si substrate near a SiGe/Si interface by using split HOLZ line patterns" @default.
- Q84258522 prefLabel "Automated characterization of bending and expansion of a lattice of a Si substrate near a SiGe/Si interface by using split HOLZ line patterns" @default.
- Q84258522 P1433 Q84258522-46512DD6-7676-4D9D-8C93-83ECDC0C1621 @default.
- Q84258522 P1476 Q84258522-2270E9AC-6FEA-4B70-B930-FF15983BC677 @default.
- Q84258522 P2093 Q84258522-173DCE99-12DE-4A96-BC1E-8E6F61306CB7 @default.
- Q84258522 P2093 Q84258522-C5B1024C-4DE0-4863-9594-4F92322ECAE6 @default.
- Q84258522 P2093 Q84258522-D6385646-72D2-4029-8118-609058848DEB @default.
- Q84258522 P2093 Q84258522-FB9E673C-AA90-40DC-B0AF-4F216036346B @default.
- Q84258522 P304 Q84258522-48CAED25-85A9-41F6-B535-E8AC5653F6ED @default.
- Q84258522 P31 Q84258522-938142DB-B13F-403C-AA33-EF7DD06E2F9A @default.
- Q84258522 P356 Q84258522-84627326-0C12-405F-8C7D-53CE5CF9201C @default.
- Q84258522 P433 Q84258522-4D2E0085-C987-44BC-9448-95827F00EABE @default.
- Q84258522 P478 Q84258522-14B55373-CEB4-4DCD-B8F8-ABC27829D6EF @default.
- Q84258522 P577 Q84258522-81A7D036-4EAD-40AE-9C31-F39AAA02CC76 @default.
- Q84258522 P698 Q84258522-7BD44DCF-0530-44AA-8F95-6978DF993FCE @default.
- Q84258522 P356 DFQ016 @default.
- Q84258522 P698 20484750 @default.
- Q84258522 P1433 Q15746444 @default.
- Q84258522 P1476 "Automated characterization of bending and expansion of a lattice of a Si substrate near a SiGe/Si interface by using split HOLZ line patterns" @default.
- Q84258522 P2093 "Koh Saitoh" @default.
- Q84258522 P2093 "Maiko Hamabe" @default.
- Q84258522 P2093 "Nobuo Tanaka" @default.
- Q84258522 P2093 "Yoshifumi Yasuda" @default.
- Q84258522 P304 "367-378" @default.
- Q84258522 P31 Q13442814 @default.
- Q84258522 P356 "10.1093/JMICRO/DFQ016" @default.
- Q84258522 P433 "5" @default.
- Q84258522 P478 "59" @default.
- Q84258522 P577 "2010-05-19T00:00:00Z" @default.
- Q84258522 P698 "20484750" @default.