Matches in Wikidata for { <http://www.wikidata.org/entity/Q84543856> ?p ?o ?g. }
- Q84543856 description "2009 nî lūn-bûn" @default.
- Q84543856 description "2009年の論文" @default.
- Q84543856 description "2009年学术文章" @default.
- Q84543856 description "2009年学术文章" @default.
- Q84543856 description "2009年学术文章" @default.
- Q84543856 description "2009年学术文章" @default.
- Q84543856 description "2009年学术文章" @default.
- Q84543856 description "2009年学术文章" @default.
- Q84543856 description "2009年學術文章" @default.
- Q84543856 description "2009年學術文章" @default.
- Q84543856 description "2009年學術文章" @default.
- Q84543856 description "2009年學術文章" @default.
- Q84543856 description "2009年學術文章" @default.
- Q84543856 description "2009년 논문" @default.
- Q84543856 description "article científic" @default.
- Q84543856 description "article scientific" @default.
- Q84543856 description "article scientifique" @default.
- Q84543856 description "articol științific" @default.
- Q84543856 description "articolo scientifico" @default.
- Q84543856 description "artigo científico" @default.
- Q84543856 description "artigo científico" @default.
- Q84543856 description "artigo científico" @default.
- Q84543856 description "artikel ilmiah" @default.
- Q84543856 description "artikull shkencor" @default.
- Q84543856 description "artikulong pang-agham" @default.
- Q84543856 description "artykuł naukowy" @default.
- Q84543856 description "artículo científico publicado en 2009" @default.
- Q84543856 description "artículu científicu" @default.
- Q84543856 description "bilimsel makale" @default.
- Q84543856 description "bài báo khoa học" @default.
- Q84543856 description "naučni članak" @default.
- Q84543856 description "scienca artikolo" @default.
- Q84543856 description "scientific article published in September 2009" @default.
- Q84543856 description "scientific article published in September 2009" @default.
- Q84543856 description "scientific article published on 01 September 2009" @default.
- Q84543856 description "teaduslik artikkel" @default.
- Q84543856 description "tieteellinen artikkeli" @default.
- Q84543856 description "tudományos cikk" @default.
- Q84543856 description "vedecký článok" @default.
- Q84543856 description "vetenskaplig artikel" @default.
- Q84543856 description "videnskabelig artikel udgivet september 2009" @default.
- Q84543856 description "vitenskapelig artikkel" @default.
- Q84543856 description "vitskapeleg artikkel" @default.
- Q84543856 description "vědecký článek" @default.
- Q84543856 description "wetenschappelijk artikel" @default.
- Q84543856 description "wissenschaftlicher Artikel" @default.
- Q84543856 description "επιστημονικό άρθρο" @default.
- Q84543856 description "мақолаи илмӣ" @default.
- Q84543856 description "наукова стаття, опублікована у вересні 2009" @default.
- Q84543856 description "научна статия" @default.
- Q84543856 description "научная статья" @default.
- Q84543856 description "научни чланак" @default.
- Q84543856 description "научни чланак" @default.
- Q84543856 description "מאמר מדעי" @default.
- Q84543856 description "مقالة علمية نشرت في سبتمبر 2009" @default.
- Q84543856 description "সেপ্টেম্বর ২০০৯-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q84543856 description "บทความทางวิทยาศาสตร์" @default.
- Q84543856 description "სამეცნიერო სტატია" @default.
- Q84543856 name "Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching" @default.
- Q84543856 name "Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching" @default.
- Q84543856 type Item @default.
- Q84543856 label "Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching" @default.
- Q84543856 label "Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching" @default.
- Q84543856 prefLabel "Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching" @default.
- Q84543856 prefLabel "Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching" @default.
- Q84543856 P1104 Q84543856-DEC5699B-39DF-4419-9299-054DE990C82B @default.
- Q84543856 P1433 Q84543856-A4D700F1-C0BA-4034-9E6E-4EA07E6E40EA @default.
- Q84543856 P1476 Q84543856-E088FB51-1CF2-4F11-8B96-45CF05BECC9C @default.
- Q84543856 P2093 Q84543856-2506FA1F-E4A0-47BC-9E53-1BB9A4692E30 @default.
- Q84543856 P2093 Q84543856-45C64914-ABC6-47AC-9AF2-D51446AA4AC6 @default.
- Q84543856 P2093 Q84543856-5C6824EF-4F26-4C6B-A101-E696452AE91E @default.
- Q84543856 P2093 Q84543856-BF31AEDD-E93A-4968-8D9F-CA5B61A62ADE @default.
- Q84543856 P304 Q84543856-F18D5A66-75E9-4A18-91FE-660D9DF764C7 @default.
- Q84543856 P31 Q84543856-C518939B-DF28-4FAF-8676-EFB46011A513 @default.
- Q84543856 P356 Q84543856-F96537A6-6189-4337-9FF1-EDBB518C8603 @default.
- Q84543856 P407 Q84543856-F3BE99F7-7362-4558-90C1-8D51F4B12AC7 @default.
- Q84543856 P433 Q84543856-3EC8669B-F009-438E-9373-E3AF176D5F20 @default.
- Q84543856 P478 Q84543856-B6574920-8798-4767-80D5-611A7DBF63D2 @default.
- Q84543856 P50 Q84543856-3C1A01D1-12D8-4811-BDFA-7772E7DC997F @default.
- Q84543856 P50 Q84543856-6CA571B5-0B1B-4354-99A9-DEBA667D831D @default.
- Q84543856 P577 Q84543856-12961E59-C09D-4A4C-AEB6-459828B14026 @default.
- Q84543856 P698 Q84543856-C43205B1-4182-42E6-B5C0-17131A1DB3B8 @default.
- Q84543856 P356 AO.48.004996 @default.
- Q84543856 P698 19745863 @default.
- Q84543856 P1104 "+9" @default.
- Q84543856 P1433 Q4781557 @default.
- Q84543856 P1476 "Spectroscopic ellipsometry analysis of silicon nanotips obtained by electron cyclotron resonance plasma etching" @default.
- Q84543856 P2093 "Hans Arwin" @default.
- Q84543856 P2093 "Kuei-Hsien Chen" @default.
- Q84543856 P2093 "Li-Chyong Chen" @default.
- Q84543856 P2093 "Yi-Fan Huang" @default.
- Q84543856 P304 "4996-5004" @default.
- Q84543856 P31 Q13442814 @default.
- Q84543856 P356 "10.1364/AO.48.004996" @default.
- Q84543856 P407 Q1860 @default.
- Q84543856 P433 "26" @default.
- Q84543856 P478 "48" @default.
- Q84543856 P50 Q78122920 @default.
- Q84543856 P50 Q80695842 @default.
- Q84543856 P577 "2009-09-01T00:00:00Z" @default.