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- Q84960154 description "artículu científicu espublizáu en xunetu de 2012" @default.
- Q84960154 description "scientific article published on 01 July 2012" @default.
- Q84960154 description "wetenschappelijk artikel" @default.
- Q84960154 description "наукова стаття, опублікована в липні 2012" @default.
- Q84960154 name "Nano-scale stick-slip friction model for the chatter scratch generated by chemical mechanical polishing process" @default.
- Q84960154 name "Nano-scale stick-slip friction model for the chatter scratch generated by chemical mechanical polishing process" @default.
- Q84960154 type Item @default.
- Q84960154 label "Nano-scale stick-slip friction model for the chatter scratch generated by chemical mechanical polishing process" @default.
- Q84960154 label "Nano-scale stick-slip friction model for the chatter scratch generated by chemical mechanical polishing process" @default.
- Q84960154 prefLabel "Nano-scale stick-slip friction model for the chatter scratch generated by chemical mechanical polishing process" @default.
- Q84960154 prefLabel "Nano-scale stick-slip friction model for the chatter scratch generated by chemical mechanical polishing process" @default.
- Q84960154 P1433 Q84960154-583A2273-B668-4A2D-90FE-38EC35EEC5E8 @default.
- Q84960154 P1476 Q84960154-142F93F3-907B-44DB-8CFD-06E90F1B8081 @default.
- Q84960154 P2093 Q84960154-2BC5A4D6-89A1-402A-8B9F-02669D84B2E6 @default.
- Q84960154 P2093 Q84960154-4DA1674A-99A8-4A8A-89A3-636C152C80CD @default.
- Q84960154 P2093 Q84960154-66602773-629F-4765-9AC6-233162535382 @default.
- Q84960154 P2093 Q84960154-BCDCAC72-ECA8-45F3-ABBA-EE47B1C27E8E @default.
- Q84960154 P2093 Q84960154-BD48762A-88FC-442E-93BF-1EC4AE1FCBF6 @default.
- Q84960154 P304 Q84960154-D923139D-6641-4998-8B91-6EE776D3E1CC @default.
- Q84960154 P31 Q84960154-15377AC5-1E7B-47FB-B3DE-00B3549C5217 @default.
- Q84960154 P356 Q84960154-32D08912-4525-4A3A-85B4-057411591AA0 @default.
- Q84960154 P407 Q84960154-9FFFAD5F-BB2B-40B1-9882-BDF73C30F2D4 @default.
- Q84960154 P433 Q84960154-CB2E1683-3F64-4725-86EE-4BFE3DEB23E2 @default.
- Q84960154 P478 Q84960154-B188B2A9-CBC5-4404-BCBF-C8CDD3F228AD @default.
- Q84960154 P577 Q84960154-DC861BEB-7864-46DE-828D-2C19F1677270 @default.
- Q84960154 P698 Q84960154-CE475152-35F4-43A2-962C-9CBAAE7C9207 @default.
- Q84960154 P356 JNN.2012.6389 @default.
- Q84960154 P698 22966633 @default.
- Q84960154 P1433 Q2364336 @default.
- Q84960154 P1476 "Nano-scale stick-slip friction model for the chatter scratch generated by chemical mechanical polishing process" @default.
- Q84960154 P2093 "Bo Un Yoon" @default.
- Q84960154 P2093 "Hong Jin Kim" @default.
- Q84960154 P2093 "Hyeon-Deok Lee" @default.
- Q84960154 P2093 "Ji Chul Yang" @default.
- Q84960154 P2093 "Taesung Kim" @default.
- Q84960154 P304 "5683-5686" @default.
- Q84960154 P31 Q13442814 @default.
- Q84960154 P356 "10.1166/JNN.2012.6389" @default.
- Q84960154 P407 Q1860 @default.
- Q84960154 P433 "7" @default.
- Q84960154 P478 "12" @default.
- Q84960154 P577 "2012-07-01T00:00:00Z" @default.
- Q84960154 P698 "22966633" @default.