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- Q85058486 description "artículu científicu espublizáu n'avientu de 1993" @default.
- Q85058486 description "scientific article published on 01 December 1993" @default.
- Q85058486 description "wetenschappelijk artikel" @default.
- Q85058486 description "наукова стаття, опублікована в грудні 1993" @default.
- Q85058486 description "գիտական հոդված հրատարակված 1993 թվականի դեկտեմբերի 1-ին" @default.
- Q85058486 name "Synchrotron radiation sources and condensers for projection x-ray lithography" @default.
- Q85058486 name "Synchrotron radiation sources and condensers for projection x-ray lithography" @default.
- Q85058486 type Item @default.
- Q85058486 label "Synchrotron radiation sources and condensers for projection x-ray lithography" @default.
- Q85058486 label "Synchrotron radiation sources and condensers for projection x-ray lithography" @default.
- Q85058486 prefLabel "Synchrotron radiation sources and condensers for projection x-ray lithography" @default.
- Q85058486 prefLabel "Synchrotron radiation sources and condensers for projection x-ray lithography" @default.
- Q85058486 P1104 Q85058486-E466B6C0-65DB-4096-B64A-10C32BB7F4A4 @default.
- Q85058486 P1433 Q85058486-67730817-4AFF-4DBB-8009-A711702B589B @default.
- Q85058486 P1476 Q85058486-2EA4BAC0-0AF3-4428-86DB-6ED831A37A2C @default.
- Q85058486 P2093 Q85058486-3ABD2088-4883-4CFD-A6FE-59524048637F @default.
- Q85058486 P2093 Q85058486-8A0DD719-2B77-4502-A02E-5B3AC3D3583C @default.
- Q85058486 P2093 Q85058486-C7008814-1180-43F0-84F5-819411F248BC @default.
- Q85058486 P2093 Q85058486-F75DF926-5664-4C15-A923-44C0ED070E48 @default.
- Q85058486 P304 Q85058486-CBECF134-B704-438F-B1A6-EA892FC56B4A @default.
- Q85058486 P31 Q85058486-46993B62-E798-41C0-8029-26A58C6234EE @default.
- Q85058486 P356 Q85058486-829103A5-D53C-41D8-8C33-CE53117867D9 @default.
- Q85058486 P407 Q85058486-B0167AAB-6980-4C54-A5A7-5BE3BA106895 @default.
- Q85058486 P433 Q85058486-377014AC-BC28-442F-807A-FB3E825823AA @default.
- Q85058486 P478 Q85058486-0362208A-9AD2-4A59-AB43-45899D91BA4B @default.
- Q85058486 P577 Q85058486-5F330482-D24E-4C58-ACBE-DE0EEAB231EA @default.
- Q85058486 P698 Q85058486-89F844EA-FA50-4FA7-8BCE-51056132BF17 @default.
- Q85058486 P819 Q85058486-89C07E25-AFFF-49C3-8ACA-9DB0256AD2A8 @default.
- Q85058486 P921 Q85058486-49B5A949-02AF-4FDF-85B1-3A820A595F49 @default.
- Q85058486 P356 AO.32.006920 @default.
- Q85058486 P698 20856546 @default.
- Q85058486 P1104 "+10" @default.
- Q85058486 P1433 Q4781557 @default.
- Q85058486 P1476 "Synchrotron radiation sources and condensers for projection x-ray lithography" @default.
- Q85058486 P2093 "A A Macdowell" @default.
- Q85058486 P2093 "D L White" @default.
- Q85058486 P2093 "J B Murphy" @default.
- Q85058486 P2093 "O R Wood Ii" @default.
- Q85058486 P304 "6920-6929" @default.
- Q85058486 P31 Q13442814 @default.
- Q85058486 P356 "10.1364/AO.32.006920" @default.
- Q85058486 P407 Q1860 @default.
- Q85058486 P433 "34" @default.
- Q85058486 P478 "32" @default.
- Q85058486 P577 "1993-12-01T00:00:00Z" @default.
- Q85058486 P698 "20856546" @default.
- Q85058486 P819 "1993ApOpt..32.6920M" @default.
- Q85058486 P921 Q212871 @default.