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- Q85058515 description "artículu científicu espublizáu n'avientu de 1993" @default.
- Q85058515 description "scientific article published on 01 December 1993" @default.
- Q85058515 description "wetenschappelijk artikel" @default.
- Q85058515 description "наукова стаття, опублікована в грудні 1993" @default.
- Q85058515 name "Mask technologies for soft-x-ray projection lithography at 13 nm" @default.
- Q85058515 name "Mask technologies for soft-x-ray projection lithography at 13 nm" @default.
- Q85058515 type Item @default.
- Q85058515 label "Mask technologies for soft-x-ray projection lithography at 13 nm" @default.
- Q85058515 label "Mask technologies for soft-x-ray projection lithography at 13 nm" @default.
- Q85058515 prefLabel "Mask technologies for soft-x-ray projection lithography at 13 nm" @default.
- Q85058515 prefLabel "Mask technologies for soft-x-ray projection lithography at 13 nm" @default.
- Q85058515 P1104 Q85058515-CA22BA90-8E08-44FE-A744-BC9BC980D39C @default.
- Q85058515 P1433 Q85058515-445C1082-2950-4A87-96A9-63AF29EF520C @default.
- Q85058515 P1476 Q85058515-D03FEB4C-311A-4221-B2D5-E4A308FCFC1A @default.
- Q85058515 P2093 Q85058515-25EB6897-2E38-418A-A2FC-B5C12098518C @default.
- Q85058515 P2093 Q85058515-276C2500-7129-475E-8A26-CC2EA262AF02 @default.
- Q85058515 P2093 Q85058515-4F3C0F55-6E0E-475A-AFF2-5ACB63119FC0 @default.
- Q85058515 P2093 Q85058515-4F70A22D-F921-44C0-833D-9F71486D2F66 @default.
- Q85058515 P2093 Q85058515-96FA5010-42D2-4CC2-9BD6-98C095BB2935 @default.
- Q85058515 P2093 Q85058515-AD793717-0EFB-489B-98DC-3BF9CEE5AE06 @default.
- Q85058515 P2093 Q85058515-CA03EF05-C7AC-4B22-9E6E-92D436D79527 @default.
- Q85058515 P2093 Q85058515-F74088E4-9D42-4B9F-A41F-A302D9E71B5A @default.
- Q85058515 P2093 Q85058515-F7A34A59-A651-4274-853B-3136C3F488D6 @default.
- Q85058515 P304 Q85058515-97A1BC97-01FC-4C21-B63A-ACD1E9829C0D @default.
- Q85058515 P31 Q85058515-C472CE9B-7AB6-4E30-A299-BFFB01F88733 @default.
- Q85058515 P356 Q85058515-542112FD-1758-457F-800A-D6C009BB6A9B @default.
- Q85058515 P407 Q85058515-89046458-2D9B-4DF4-B82E-3906CBD5FFB6 @default.
- Q85058515 P433 Q85058515-0807FCB2-8175-4F8A-B148-C20AEDDA4BF0 @default.
- Q85058515 P478 Q85058515-C52A0C06-F055-49F3-A5B7-EB7B3FB9DB95 @default.
- Q85058515 P577 Q85058515-9F1649E2-EF27-4FED-849A-F6368CD472EB @default.
- Q85058515 P698 Q85058515-EA40718E-AD09-44EB-9215-4B3231AA31A8 @default.
- Q85058515 P819 Q85058515-139AC407-23D0-42C8-A27C-49F475695253 @default.
- Q85058515 P356 AO.32.007007 @default.
- Q85058515 P698 20856559 @default.
- Q85058515 P1104 "+5" @default.
- Q85058515 P1433 Q4781557 @default.
- Q85058515 P1476 "Mask technologies for soft-x-ray projection lithography at 13 nm" @default.
- Q85058515 P2093 "A A Macdowell" @default.
- Q85058515 P2093 "D L Windt" @default.
- Q85058515 P2093 "D M Tennant" @default.
- Q85058515 P2093 "J Z Pastalan" @default.
- Q85058515 P2093 "L A Fetter" @default.
- Q85058515 P2093 "L R Harriott" @default.
- Q85058515 P2093 "O R Wood Ii" @default.
- Q85058515 P2093 "P P Mulgrew" @default.
- Q85058515 P2093 "W K Waskiewicz" @default.
- Q85058515 P304 "7007-7011" @default.
- Q85058515 P31 Q13442814 @default.
- Q85058515 P356 "10.1364/AO.32.007007" @default.
- Q85058515 P407 Q1860 @default.
- Q85058515 P433 "34" @default.
- Q85058515 P478 "32" @default.
- Q85058515 P577 "1993-12-01T00:00:00Z" @default.
- Q85058515 P698 "20856559" @default.
- Q85058515 P819 "1993ApOpt..32.7007T" @default.