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- Q85058534 description "article scientifique publié en 1993" @default.
- Q85058534 description "artículu científicu espublizáu n'avientu de 1993" @default.
- Q85058534 description "scientific article published on 01 December 1993" @default.
- Q85058534 description "wetenschappelijk artikel" @default.
- Q85058534 description "наукова стаття, опублікована в грудні 1993" @default.
- Q85058534 name "Characterization of AZ PN114 resist for soft-x-ray projection lithography" @default.
- Q85058534 name "Characterization of AZ PN114 resist for soft-x-ray projection lithography" @default.
- Q85058534 type Item @default.
- Q85058534 label "Characterization of AZ PN114 resist for soft-x-ray projection lithography" @default.
- Q85058534 label "Characterization of AZ PN114 resist for soft-x-ray projection lithography" @default.
- Q85058534 prefLabel "Characterization of AZ PN114 resist for soft-x-ray projection lithography" @default.
- Q85058534 prefLabel "Characterization of AZ PN114 resist for soft-x-ray projection lithography" @default.
- Q85058534 P1433 Q85058534-BFF01AE1-939E-49EE-ABD2-0FB03AA61438 @default.
- Q85058534 P1476 Q85058534-7C227946-49B6-4F09-B31F-72202F638FCE @default.
- Q85058534 P2093 Q85058534-116A3A04-9A44-404A-8B82-B66D3629315B @default.
- Q85058534 P2093 Q85058534-424AC2F6-28EA-46B3-92D8-8561FFEA1D86 @default.
- Q85058534 P2093 Q85058534-4B3BD3EE-F802-4D27-BB6F-3F788F3E2835 @default.
- Q85058534 P2093 Q85058534-5153797F-51C2-4C13-8835-48A90C6EBF05 @default.
- Q85058534 P2093 Q85058534-813C7CDF-8D80-46E7-869E-6FDB75C3E195 @default.
- Q85058534 P2093 Q85058534-8EAC12A0-60B8-467B-BDBB-9AAED14BF497 @default.
- Q85058534 P2093 Q85058534-E1BBAF04-F315-4524-A79B-6202F0AFCF52 @default.
- Q85058534 P2093 Q85058534-F1CAE117-386E-47C8-A63E-8A5A5D2844E9 @default.
- Q85058534 P304 Q85058534-2F600008-57FF-4342-93FD-FA07394035CA @default.
- Q85058534 P31 Q85058534-B26E0122-DCFC-405C-B175-36F3ACE4A22A @default.
- Q85058534 P356 Q85058534-5859B299-DB59-4115-BEC6-A2F930F1A104 @default.
- Q85058534 P407 Q85058534-FAC4714F-FA32-43B0-B17D-3D14E0E5A5C3 @default.
- Q85058534 P433 Q85058534-5F4AA496-5410-409C-8D92-D5CA4F83986F @default.
- Q85058534 P478 Q85058534-89E662ED-FA0B-4DAC-9785-3FCA15B59101 @default.
- Q85058534 P577 Q85058534-2AE7A883-3FB9-430F-BC34-BC840FB849F6 @default.
- Q85058534 P698 Q85058534-E5C956B0-6563-4FF2-988B-23A5F132915F @default.
- Q85058534 P819 Q85058534-5B42330D-14DB-400A-AA46-D9584B5EB49E @default.
- Q85058534 P356 AO.32.007044 @default.
- Q85058534 P698 20856565 @default.
- Q85058534 P1433 Q4781557 @default.
- Q85058534 P1476 "Characterization of AZ PN114 resist for soft-x-ray projection lithography" @default.
- Q85058534 P2093 "A A Macdowell" @default.
- Q85058534 P2093 "D A Tichenor" @default.
- Q85058534 P2093 "D M Tennant" @default.
- Q85058534 P2093 "D Y Jeon" @default.
- Q85058534 P2093 "G D Kubiak" @default.
- Q85058534 P2093 "K Early" @default.
- Q85058534 P2093 "O R Wood Ii" @default.
- Q85058534 P2093 "P P Mulgrew" @default.
- Q85058534 P304 "7044-7049" @default.
- Q85058534 P31 Q13442814 @default.
- Q85058534 P356 "10.1364/AO.32.007044" @default.
- Q85058534 P407 Q1860 @default.
- Q85058534 P433 "34" @default.
- Q85058534 P478 "32" @default.
- Q85058534 P577 "1993-12-01T00:00:00Z" @default.
- Q85058534 P698 "20856565" @default.
- Q85058534 P819 "1993ApOpt..32.7044E" @default.