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- Q86586722 description "artículu científicu espublizáu n'abril de 2013" @default.
- Q86586722 description "im April 2013 veröffentlichter wissenschaftlicher Artikel" @default.
- Q86586722 description "scientific article published on 29 April 2013" @default.
- Q86586722 description "wetenschappelijk artikel" @default.
- Q86586722 description "наукова стаття, опублікована у квітні 2013" @default.
- Q86586722 name "Structural investigation of Cr(Al)N/SiOx films prepared on Si substrates by differential pumping cosputtering" @default.
- Q86586722 name "Structural investigation of Cr(Al)N/SiOx films prepared on Si substrates by differential pumping cosputtering" @default.
- Q86586722 type Item @default.
- Q86586722 label "Structural investigation of Cr(Al)N/SiOx films prepared on Si substrates by differential pumping cosputtering" @default.
- Q86586722 label "Structural investigation of Cr(Al)N/SiOx films prepared on Si substrates by differential pumping cosputtering" @default.
- Q86586722 prefLabel "Structural investigation of Cr(Al)N/SiOx films prepared on Si substrates by differential pumping cosputtering" @default.
- Q86586722 prefLabel "Structural investigation of Cr(Al)N/SiOx films prepared on Si substrates by differential pumping cosputtering" @default.
- Q86586722 P1433 Q86586722-3E448E92-253A-4A5A-B870-74B7F277D238 @default.
- Q86586722 P1476 Q86586722-513266F4-EC78-4BB4-A3EE-2ED9D559E711 @default.
- Q86586722 P2093 Q86586722-0FC5FE48-7D81-4FD1-8AA0-6151AEA12256 @default.
- Q86586722 P2093 Q86586722-39E3E0DB-C050-4532-A3EB-45A4A424745E @default.
- Q86586722 P2093 Q86586722-82E3E32D-BB92-4FF9-B840-41877EF2FC07 @default.
- Q86586722 P2093 Q86586722-F1F4554F-0D28-47D8-917C-1FC20880C947 @default.
- Q86586722 P2093 Q86586722-F4EB6D8B-652B-49FA-B116-AEA527A2F2E8 @default.
- Q86586722 P304 Q86586722-DCE5DCD9-969E-4975-AD8E-80FF3010D8CD @default.
- Q86586722 P31 Q86586722-8CA527F7-EBAD-4ED8-B12E-DC44F3E56CCE @default.
- Q86586722 P356 Q86586722-86336E9D-395C-4AE5-8914-CCA3666FBA3B @default.
- Q86586722 P433 Q86586722-C1708CAF-E615-4304-A912-E63DD3C0A3A8 @default.
- Q86586722 P478 Q86586722-7BD0A623-BAF8-433A-B7B3-ED0D5F344DFB @default.
- Q86586722 P577 Q86586722-0B27EDD9-DAAF-4F5E-B0BC-3A44370A4189 @default.
- Q86586722 P698 Q86586722-23827D84-8DF0-4A73-A3D4-39947F6406E0 @default.
- Q86586722 P356 AM400477F @default.
- Q86586722 P698 23582015 @default.
- Q86586722 P1433 Q2819060 @default.
- Q86586722 P1476 "Structural investigation of Cr(Al)N/SiOx films prepared on Si substrates by differential pumping cosputtering" @default.
- Q86586722 P2093 "Hiroshi Takabatake" @default.
- Q86586722 P2093 "Ichiro Onishi" @default.
- Q86586722 P2093 "Makoto Shiojiri" @default.
- Q86586722 P2093 "Masahiro Kawasaki" @default.
- Q86586722 P2093 "Masateru Nose" @default.
- Q86586722 P304 "3833-3838" @default.
- Q86586722 P31 Q13442814 @default.
- Q86586722 P356 "10.1021/AM400477F" @default.
- Q86586722 P433 "9" @default.
- Q86586722 P478 "5" @default.
- Q86586722 P577 "2013-04-29T00:00:00Z" @default.
- Q86586722 P698 "23582015" @default.