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- Q86676678 description "article scientifique publié en 2006" @default.
- Q86676678 description "artículu científicu espublizáu en febreru de 2006" @default.
- Q86676678 description "scientific article published on 21 February 2006" @default.
- Q86676678 description "wetenschappelijk artikel" @default.
- Q86676678 description "наукова стаття, опублікована в лютому 2006" @default.
- Q86676678 name "Investigation of micro-electro-mechanical processing characteristics of layered boron nitride and carbon films" @default.
- Q86676678 name "Investigation of micro-electro-mechanical processing characteristics of layered boron nitride and carbon films" @default.
- Q86676678 type Item @default.
- Q86676678 label "Investigation of micro-electro-mechanical processing characteristics of layered boron nitride and carbon films" @default.
- Q86676678 label "Investigation of micro-electro-mechanical processing characteristics of layered boron nitride and carbon films" @default.
- Q86676678 prefLabel "Investigation of micro-electro-mechanical processing characteristics of layered boron nitride and carbon films" @default.
- Q86676678 prefLabel "Investigation of micro-electro-mechanical processing characteristics of layered boron nitride and carbon films" @default.
- Q86676678 P1104 Q86676678-514C0340-1DD1-4AA9-AB46-608BCE6BC681 @default.
- Q86676678 P1433 Q86676678-D8A2A868-8743-40E1-9D47-31C43B28CE70 @default.
- Q86676678 P1476 Q86676678-E793B678-040C-49A6-B3C9-3FF34B3243FB @default.
- Q86676678 P2093 Q86676678-09B7656F-3047-4BE8-80E1-6DD2088FE6DA @default.
- Q86676678 P2093 Q86676678-9E6871FF-78AE-4D54-8C56-5988A716DA43 @default.
- Q86676678 P304 Q86676678-52CE61C2-B2BD-4671-98A0-7E3F3971CBE1 @default.
- Q86676678 P31 Q86676678-46F036BA-2143-4572-BEED-8AC56E27344C @default.
- Q86676678 P356 Q86676678-292711D3-01AD-44CD-A7C0-37A7E338ACB2 @default.
- Q86676678 P433 Q86676678-E2472CBC-AB5D-42B6-A8B1-A44AA227A925 @default.
- Q86676678 P478 Q86676678-621C82D4-7324-4B88-B077-4E91D337E4B4 @default.
- Q86676678 P50 Q86676678-C3B5B33A-DBBD-4BDF-A821-09D5C45BA2A9 @default.
- Q86676678 P577 Q86676678-6A6D98E7-E01D-458D-B3D9-DA57B97117FE @default.
- Q86676678 P698 Q86676678-FCD8ADD1-C52E-4EE1-97DA-83DD200FAD22 @default.
- Q86676678 P356 013 @default.
- Q86676678 P698 26558567 @default.
- Q86676678 P1104 "+8" @default.
- Q86676678 P1433 Q972896 @default.
- Q86676678 P1476 "Investigation of micro-electro-mechanical processing characteristics of layered boron nitride and carbon films" @default.
- Q86676678 P2093 "J Kim" @default.
- Q86676678 P2093 "M Wang" @default.
- Q86676678 P304 "1607-1614" @default.
- Q86676678 P31 Q13442814 @default.
- Q86676678 P356 "10.1088/0957-4484/17/6/013" @default.
- Q86676678 P433 "6" @default.
- Q86676678 P478 "17" @default.
- Q86676678 P50 Q86214385 @default.
- Q86676678 P577 "2006-02-21T00:00:00Z" @default.
- Q86676678 P698 "26558567" @default.