Matches in Wikidata for { <http://www.wikidata.org/entity/Q87007413> ?p ?o ?g. }
Showing items 1 to 63 of
63
with 100 items per page.
- Q87007413 description "artículu científicu espublizáu en payares de 2015" @default.
- Q87007413 description "scientific article published on 01 November 2015" @default.
- Q87007413 description "wetenschappelijk artikel" @default.
- Q87007413 description "наукова стаття, опублікована в листопаді 2015" @default.
- Q87007413 name "Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant" @default.
- Q87007413 name "Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant" @default.
- Q87007413 type Item @default.
- Q87007413 label "Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant" @default.
- Q87007413 label "Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant" @default.
- Q87007413 prefLabel "Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant" @default.
- Q87007413 prefLabel "Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant" @default.
- Q87007413 P1433 Q87007413-E1B7132B-AC02-448F-8235-912A56CA6047 @default.
- Q87007413 P1476 Q87007413-1208822F-3D2A-4BAB-ABD8-EAA1E60D0648 @default.
- Q87007413 P2093 Q87007413-19508049-E405-43D1-9295-37AE2BD9EF51 @default.
- Q87007413 P2093 Q87007413-2750979C-A6D6-40D8-801F-9E47AABAE88E @default.
- Q87007413 P2093 Q87007413-33101A3A-1E94-4F66-863E-4E57DB33FD8F @default.
- Q87007413 P2093 Q87007413-38EFFDD3-0EFD-482C-9E17-078A1CAA88EE @default.
- Q87007413 P2093 Q87007413-3B67E0F2-6336-4DB8-A11B-FB0500497DD4 @default.
- Q87007413 P2093 Q87007413-3BAE0740-98CF-4749-843E-7ABB7B0B4D55 @default.
- Q87007413 P2093 Q87007413-527FF089-8602-405A-9105-8CA05C7B8061 @default.
- Q87007413 P2093 Q87007413-6ECAB248-0CEC-474D-A809-8AFD42D2FB2D @default.
- Q87007413 P2093 Q87007413-753F7D19-F484-4A3A-BA30-8A5626B099DC @default.
- Q87007413 P2093 Q87007413-78036F5C-E266-4BEE-966F-3EFDA7F889C5 @default.
- Q87007413 P2093 Q87007413-A581B674-32C1-4766-80FD-2A1540EB924F @default.
- Q87007413 P2093 Q87007413-B0423D0E-E775-42D4-8E4C-C196F67CA1F3 @default.
- Q87007413 P2093 Q87007413-BCC3D51C-97B8-499E-9638-0C4FA159B193 @default.
- Q87007413 P2093 Q87007413-C3034584-4906-4087-A627-71E3BE9D348B @default.
- Q87007413 P304 Q87007413-D2D890B8-206D-454C-ABE4-EEA4B221D847 @default.
- Q87007413 P31 Q87007413-A354B26F-BC2C-483B-917B-0B4C9DE7DB14 @default.
- Q87007413 P356 Q87007413-6B85B863-76E0-44F0-982B-E9FC81B64943 @default.
- Q87007413 P407 Q87007413-F63C6740-5360-40F7-8C5D-D5D31C762D8F @default.
- Q87007413 P433 Q87007413-D62D4919-972D-4F49-AE37-0885C344D653 @default.
- Q87007413 P478 Q87007413-F1992C5F-51D8-4AC7-BF92-3D1A7B906234 @default.
- Q87007413 P577 Q87007413-5804006E-14BD-40A4-A564-1B63FB659FA0 @default.
- Q87007413 P698 Q87007413-A8D73975-5F02-41DA-9977-F3B6D70E684D @default.
- Q87007413 P921 Q87007413-CD94CA16-B204-4F37-A995-ECDBAEDC3C7F @default.
- Q87007413 P356 JNN.2015.11452 @default.
- Q87007413 P698 26726537 @default.
- Q87007413 P1433 Q2364336 @default.
- Q87007413 P1476 "Atomic Layer Deposition of Ru Thin Films Using a New Beta-Diketonate Ru Precursor and NH3 Plasma as a Reactant" @default.
- Q87007413 P2093 "Hyun-Jung Lee" @default.
- Q87007413 P2093 "Jae-Hun Jung" @default.
- Q87007413 P2093 "Jeongyeop Lee" @default.
- Q87007413 P2093 "Jong Hyun Seo" @default.
- Q87007413 P2093 "Kazuharu Suzuki" @default.
- Q87007413 P2093 "Masayuki Saito" @default.
- Q87007413 P2093 "Min Young Lee" @default.
- Q87007413 P2093 "Sangdeok Kim" @default.
- Q87007413 P2093 "Seung-Joon Lee" @default.
- Q87007413 P2093 "Seungjin Yeom" @default.
- Q87007413 P2093 "Shunichi Nabeya" @default.
- Q87007413 P2093 "So Ik Bae" @default.
- Q87007413 P2093 "Soo-Hyun Kim" @default.
- Q87007413 P2093 "Taehoon Cheon" @default.
- Q87007413 P304 "8472-8477" @default.
- Q87007413 P31 Q13442814 @default.
- Q87007413 P356 "10.1166/JNN.2015.11452" @default.
- Q87007413 P407 Q1860 @default.
- Q87007413 P433 "11" @default.
- Q87007413 P478 "15" @default.
- Q87007413 P577 "2015-11-01T00:00:00Z" @default.
- Q87007413 P698 "26726537" @default.
- Q87007413 P921 Q1137203 @default.