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- Q87248911 description "artículu científicu espublizáu n'agostu de 2013" @default.
- Q87248911 description "scientific article published on 13 August 2013" @default.
- Q87248911 description "wetenschappelijk artikel" @default.
- Q87248911 description "наукова стаття, опублікована в серпні 2013" @default.
- Q87248911 name "Evaluation of resistless Ga⁺ beam lithography for UV NIL stamp fabrication" @default.
- Q87248911 name "Evaluation of resistless Ga⁺ beam lithography for UV NIL stamp fabrication" @default.
- Q87248911 type Item @default.
- Q87248911 label "Evaluation of resistless Ga⁺ beam lithography for UV NIL stamp fabrication" @default.
- Q87248911 label "Evaluation of resistless Ga⁺ beam lithography for UV NIL stamp fabrication" @default.
- Q87248911 prefLabel "Evaluation of resistless Ga⁺ beam lithography for UV NIL stamp fabrication" @default.
- Q87248911 prefLabel "Evaluation of resistless Ga⁺ beam lithography for UV NIL stamp fabrication" @default.
- Q87248911 P1433 Q87248911-4360DAEF-BDBB-4770-905C-BA6B942A75DD @default.
- Q87248911 P1476 Q87248911-A2DCF78C-605E-47EF-8646-F3048BE3ACC9 @default.
- Q87248911 P2093 Q87248911-5F76A3A5-DC9F-4801-9D3F-6234E60E6A97 @default.
- Q87248911 P2093 Q87248911-B1AFE328-E21A-45F7-AB44-C27D347E0994 @default.
- Q87248911 P2093 Q87248911-D266AC51-121C-4CF0-BD01-94C6161FDFD4 @default.
- Q87248911 P2093 Q87248911-E53A442B-1A32-41E5-BFF2-2A558905AB04 @default.
- Q87248911 P2093 Q87248911-FC22170C-72F2-46AD-A43C-345B9CE902D8 @default.
- Q87248911 P304 Q87248911-F2F28D5F-246C-4D00-8C19-59E56F6D5799 @default.
- Q87248911 P31 Q87248911-8704E999-4B8C-4399-B7D1-993303F64AF2 @default.
- Q87248911 P356 Q87248911-1F94BD1A-6C77-48A0-9CF4-9044ADBFFFDA @default.
- Q87248911 P433 Q87248911-42D72D80-3C14-4E7F-AE47-9C8147E50D04 @default.
- Q87248911 P478 Q87248911-218F596A-60A7-47AE-BB50-E887721C9C2E @default.
- Q87248911 P50 Q87248911-9EED4652-FB19-420B-8F06-FF78EACD394B @default.
- Q87248911 P577 Q87248911-9E3CACB0-9267-40FC-B732-D1563CFF907C @default.
- Q87248911 P698 Q87248911-F50CE239-3422-4C4E-8896-048D49200D06 @default.
- Q87248911 P356 365302 @default.
- Q87248911 P698 23942207 @default.
- Q87248911 P1433 Q972896 @default.
- Q87248911 P1476 "Evaluation of resistless Ga⁺ beam lithography for UV NIL stamp fabrication" @default.
- Q87248911 P2093 "A Haas" @default.
- Q87248911 P2093 "A J Bauer" @default.
- Q87248911 P2093 "L Frey" @default.
- Q87248911 P2093 "M Rumler" @default.
- Q87248911 P2093 "R Fader" @default.
- Q87248911 P304 "365302" @default.
- Q87248911 P31 Q13442814 @default.
- Q87248911 P356 "10.1088/0957-4484/24/36/365302" @default.
- Q87248911 P433 "36" @default.
- Q87248911 P478 "24" @default.
- Q87248911 P50 Q85636616 @default.
- Q87248911 P577 "2013-08-13T00:00:00Z" @default.
- Q87248911 P698 "23942207" @default.