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- Q90114138 description "artículu científicu espublizáu en marzu de 2020" @default.
- Q90114138 description "im März 2020 veröffentlichter wissenschaftlicher Artikel" @default.
- Q90114138 description "scientific article published on 04 March 2020" @default.
- Q90114138 description "wetenschappelijk artikel" @default.
- Q90114138 description "наукова стаття, опублікована 4 березня 2020" @default.
- Q90114138 name "An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications" @default.
- Q90114138 name "An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications" @default.
- Q90114138 type Item @default.
- Q90114138 label "An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications" @default.
- Q90114138 label "An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications" @default.
- Q90114138 prefLabel "An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications" @default.
- Q90114138 prefLabel "An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications" @default.
- Q90114138 P1433 Q90114138-19B7F939-C348-4AD8-9240-DB391C76A4A0 @default.
- Q90114138 P1476 Q90114138-1ADF6D6C-A942-40A0-AB4D-085D2527695A @default.
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- Q90114138 P2093 Q90114138-AEFF0FF6-7039-4C4E-985F-0526BA9D743E @default.
- Q90114138 P2093 Q90114138-B03B3CA6-C3C0-4941-A939-0BE571A7F4AB @default.
- Q90114138 P2093 Q90114138-F44166F5-A052-41FC-9B0A-C486635A3621 @default.
- Q90114138 P275 Q90114138-aa667059-ab41-4bc6-92b1-581856498441 @default.
- Q90114138 P2860 Q90114138-24A9D471-0645-48D8-B240-BBF1A44FB6DA @default.
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- Q90114138 P2860 Q90114138-DCC542FE-BE50-4334-A008-A65A083B44F7 @default.
- Q90114138 P31 Q90114138-9375B818-36D2-496C-918A-A22CD665FF1C @default.
- Q90114138 P356 Q90114138-6441937B-EEC5-4853-9363-12C09A8832FE @default.
- Q90114138 P433 Q90114138-274ED7B5-1D08-48A7-9282-F30DEF7282D9 @default.
- Q90114138 P478 Q90114138-5B590567-0001-499D-8A9B-1E9D4C0ED10A @default.
- Q90114138 P577 Q90114138-98AD20F2-8532-473C-91C5-5FB5C533CB73 @default.
- Q90114138 P6216 Q90114138-8a0e0ee7-78e5-48a9-b083-04cff58d82e8 @default.
- Q90114138 P698 Q90114138-77EA8BC6-64D1-4485-A2F6-37418E602FAB @default.
- Q90114138 P932 Q90114138-62D01206-1149-4119-A02F-7FAA79A81E65 @default.
- Q90114138 P356 MI11030267 @default.
- Q90114138 P698 32143465 @default.
- Q90114138 P1433 Q27725910 @default.
- Q90114138 P1476 "An Electret-Augmented Low-Voltage MEMS Electrostatic Out-of-Plane Actuator for Acoustic Transducer Applications" @default.
- Q90114138 P2093 "Chikako Sano" @default.
- Q90114138 P2093 "Gen Hashiguchi" @default.
- Q90114138 P2093 "Hiroshi Toshiyoshi" @default.
- Q90114138 P2093 "Manabu Ataka" @default.
- Q90114138 P275 Q20007257 @default.
- Q90114138 P2860 Q33549808 @default.
- Q90114138 P2860 Q44410734 @default.
- Q90114138 P2860 Q64265535 @default.
- Q90114138 P31 Q13442814 @default.
- Q90114138 P356 "10.3390/MI11030267" @default.
- Q90114138 P433 "3" @default.
- Q90114138 P478 "11" @default.
- Q90114138 P577 "2020-03-04T00:00:00Z" @default.
- Q90114138 P6216 Q50423863 @default.
- Q90114138 P698 "32143465" @default.
- Q90114138 P932 "7143079" @default.