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- Q91078126 description "artículu científicu espublizáu n'avientu de 2018" @default.
- Q91078126 description "im Dezember 2018 veröffentlichter wissenschaftlicher Artikel" @default.
- Q91078126 description "scientific article published on 01 December 2018" @default.
- Q91078126 description "wetenschappelijk artikel" @default.
- Q91078126 description "наукова стаття, опублікована в грудні 2018" @default.
- Q91078126 name "Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography" @default.
- Q91078126 name "Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography" @default.
- Q91078126 type Item @default.
- Q91078126 label "Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography" @default.
- Q91078126 label "Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography" @default.
- Q91078126 prefLabel "Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography" @default.
- Q91078126 prefLabel "Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography" @default.
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- Q91078126 P356 OE.26.033718 @default.
- Q91078126 P698 30650805 @default.
- Q91078126 P1433 Q3354459 @default.
- Q91078126 P1476 "Influence of barrier interlayers on the performance of Mo/Be multilayer mirrors for next-generation EUV lithography" @default.
- Q91078126 P2093 "A E Pestov" @default.
- Q91078126 P2093 "A N Nechay" @default.
- Q91078126 P2093 "A Sokolov" @default.
- Q91078126 P2093 "D A Tatarskiy" @default.
- Q91078126 P2093 "D E Pariev" @default.
- Q91078126 P2093 "F Schäfers" @default.
- Q91078126 P2093 "M G Sertsu" @default.
- Q91078126 P2093 "M V Svechnikov" @default.
- Q91078126 P2093 "M V Zorina" @default.
- Q91078126 P2093 "N I Chkhalo" @default.
- Q91078126 P2093 "N N Salashchenko" @default.
- Q91078126 P2093 "S A Gusev" @default.
- Q91078126 P2093 "V N Polkovnikov" @default.
- Q91078126 P2093 "Y A Vainer" @default.
- Q91078126 P304 "33718-33731" @default.
- Q91078126 P31 Q13442814 @default.
- Q91078126 P356 "10.1364/OE.26.033718" @default.
- Q91078126 P433 "26" @default.
- Q91078126 P478 "26" @default.
- Q91078126 P577 "2018-12-01T00:00:00Z" @default.
- Q91078126 P698 "30650805" @default.