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- Q91099328 description "article scientifique publié en 2019" @default.
- Q91099328 description "artículu científicu espublizáu n'ochobre de 2019" @default.
- Q91099328 description "im Oktober 2019 veröffentlichter wissenschaftlicher Artikel" @default.
- Q91099328 description "scientific article published on 01 October 2019" @default.
- Q91099328 description "wetenschappelijk artikel" @default.
- Q91099328 description "наукова стаття, опублікована 1 жовтня 2019" @default.
- Q91099328 name "Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings" @default.
- Q91099328 name "Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings" @default.
- Q91099328 type Item @default.
- Q91099328 label "Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings" @default.
- Q91099328 label "Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings" @default.
- Q91099328 prefLabel "Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings" @default.
- Q91099328 prefLabel "Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings" @default.
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- Q91099328 P356 OE.27.032490 @default.
- Q91099328 P698 31684461 @default.
- Q91099328 P1104 "+18" @default.
- Q91099328 P1433 Q3354459 @default.
- Q91099328 P1476 "Applicability of the Debye-Waller damping factor for the determination of the line-edge roughness of lamellar gratings" @default.
- Q91099328 P2093 "Analía Fernández Herrero" @default.
- Q91099328 P2093 "Frank Scholze" @default.
- Q91099328 P2093 "Jürgen Probst" @default.
- Q91099328 P304 "32490-32507" @default.
- Q91099328 P31 Q13442814 @default.
- Q91099328 P356 "10.1364/OE.27.032490" @default.
- Q91099328 P433 "22" @default.
- Q91099328 P478 "27" @default.
- Q91099328 P50 Q41522348 @default.
- Q91099328 P50 Q41522352 @default.
- Q91099328 P577 "2019-10-01T00:00:00Z" @default.
- Q91099328 P698 "31684461" @default.
- Q91099328 P818 "1907.05307" @default.