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- Q92635316 description "artículu científicu espublizáu en xunu de 2019" @default.
- Q92635316 description "im Juni 2019 veröffentlichter wissenschaftlicher Artikel" @default.
- Q92635316 description "scientific article published on 07 June 2019" @default.
- Q92635316 description "wetenschappelijk artikel" @default.
- Q92635316 description "наукова стаття, опублікована 7 червня 2019" @default.
- Q92635316 name "A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process" @default.
- Q92635316 name "A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process" @default.
- Q92635316 type Item @default.
- Q92635316 label "A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process" @default.
- Q92635316 label "A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process" @default.
- Q92635316 prefLabel "A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process" @default.
- Q92635316 prefLabel "A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process" @default.
- Q92635316 P1433 Q92635316-57A4F88C-91F3-4E1F-8029-7611354A52C8 @default.
- Q92635316 P1476 Q92635316-7EA94A1D-D509-4BF5-A4B7-413419F9D597 @default.
- Q92635316 P2093 Q92635316-16A1306C-E514-446D-923A-034F7C98E413 @default.
- Q92635316 P2093 Q92635316-4BEFD780-931D-4B2C-AA9E-EB20BF762E2E @default.
- Q92635316 P2093 Q92635316-8F416211-95C2-4EA1-8351-53A7A12F87F2 @default.
- Q92635316 P2093 Q92635316-92BA6D89-AB31-4DEE-B9E9-8BF65A4164C4 @default.
- Q92635316 P2093 Q92635316-D0F174F7-0675-46F6-AE81-4E749A4781F8 @default.
- Q92635316 P275 Q92635316-df7b479d-5cf4-4819-a352-08ecc0a6e0f3 @default.
- Q92635316 P2860 Q92635316-177EE804-8EC6-4959-B5CB-791E1209A3DA @default.
- Q92635316 P2860 Q92635316-996BBF29-9C75-4AA7-A840-DD060AC91E30 @default.
- Q92635316 P31 Q92635316-10D6B332-7A8B-4FD1-ADD6-8A863B392677 @default.
- Q92635316 P356 Q92635316-1EAA217E-10D5-4BC1-BE0C-36218331760F @default.
- Q92635316 P433 Q92635316-7935466A-C8A0-473C-B8A1-8D965670E2B8 @default.
- Q92635316 P478 Q92635316-2FE63FE5-D509-4FF0-9291-5F7C2569385E @default.
- Q92635316 P50 Q92635316-280AEF8A-66BA-412C-9D6F-DBF0B8B7CF2E @default.
- Q92635316 P50 Q92635316-DFEFC82E-1F3B-4C38-A790-C2DED4A5A422 @default.
- Q92635316 P577 Q92635316-8872C79C-F803-4A90-9F23-DA91F3473F71 @default.
- Q92635316 P6216 Q92635316-984b1523-6b80-4c61-9a6c-8e2a65841119 @default.
- Q92635316 P698 Q92635316-02C34811-ECDD-4652-8470-E9C11747CF5C @default.
- Q92635316 P921 Q92635316-0F75F057-AD53-4564-98B2-889142EDEBC7 @default.
- Q92635316 P932 Q92635316-D3C02B57-4DB1-4B88-9F97-49A0636A5693 @default.
- Q92635316 P356 MI10060380 @default.
- Q92635316 P698 31181589 @default.
- Q92635316 P1433 Q27725910 @default.
- Q92635316 P1476 "A MEMS Micro-g Capacitive Accelerometer Based on Through-Silicon-Wafer-Etching Process" @default.
- Q92635316 P2093 "Chenyuan Hu" @default.
- Q92635316 P2093 "Kang Rao" @default.
- Q92635316 P2093 "Mengqi Zhang" @default.
- Q92635316 P2093 "Shaolin Zhang" @default.
- Q92635316 P2093 "Xiaoli Wei" @default.
- Q92635316 P275 Q20007257 @default.
- Q92635316 P2860 Q28085542 @default.
- Q92635316 P2860 Q64100550 @default.
- Q92635316 P31 Q13442814 @default.
- Q92635316 P356 "10.3390/MI10060380" @default.
- Q92635316 P433 "6" @default.
- Q92635316 P478 "10" @default.
- Q92635316 P50 Q57421919 @default.
- Q92635316 P50 Q60992756 @default.
- Q92635316 P577 "2019-06-07T00:00:00Z" @default.
- Q92635316 P6216 Q50423863 @default.
- Q92635316 P698 "31181589" @default.
- Q92635316 P921 Q192940 @default.
- Q92635316 P932 "6630974" @default.