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- Q92745700 description "article scientifique publié en 2019" @default.
- Q92745700 description "artículu científicu espublizáu n'abril de 2019" @default.
- Q92745700 description "scientific article published on 01 April 2019" @default.
- Q92745700 description "wetenschappelijk artikel" @default.
- Q92745700 description "наукова стаття, опублікована 1 квітня 2019" @default.
- Q92745700 name "Positive- and negative-tone structuring of crystalline silicon by laser-assisted chemical etching" @default.
- Q92745700 name "Positive- and negative-tone structuring of crystalline silicon by laser-assisted chemical etching" @default.
- Q92745700 type Item @default.
- Q92745700 label "Positive- and negative-tone structuring of crystalline silicon by laser-assisted chemical etching" @default.
- Q92745700 label "Positive- and negative-tone structuring of crystalline silicon by laser-assisted chemical etching" @default.
- Q92745700 prefLabel "Positive- and negative-tone structuring of crystalline silicon by laser-assisted chemical etching" @default.
- Q92745700 prefLabel "Positive- and negative-tone structuring of crystalline silicon by laser-assisted chemical etching" @default.
- Q92745700 P1104 Q92745700-94E4E4E4-04B6-4A58-B652-2A3A409398CF @default.
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- Q92745700 P356 Q92745700-DA9BAF11-8BE0-481C-BAB8-EE137533501F @default.
- Q92745700 P433 Q92745700-BF380C63-7AF6-4664-A750-5509077776E2 @default.
- Q92745700 P478 Q92745700-FCE609A0-926D-497D-8225-BCD24250EF5A @default.
- Q92745700 P50 Q92745700-5FB98413-A624-4EFB-A528-699ED322C206 @default.
- Q92745700 P577 Q92745700-B362415A-C2AE-470A-8970-265E7DFF1B73 @default.
- Q92745700 P698 Q92745700-9332D18E-7B1A-4A9E-8D1F-0F0F7059B953 @default.
- Q92745700 P356 OL.44.001619 @default.
- Q92745700 P698 30933105 @default.
- Q92745700 P1104 "+4" @default.
- Q92745700 P1433 Q7098918 @default.
- Q92745700 P1476 "Positive- and negative-tone structuring of crystalline silicon by laser-assisted chemical etching" @default.
- Q92745700 P2093 "D Chaudanson" @default.
- Q92745700 P2093 "D Grojo" @default.
- Q92745700 P2093 "Q Li" @default.
- Q92745700 P2093 "S Lei" @default.
- Q92745700 P2093 "X Wang" @default.
- Q92745700 P2093 "X Yu" @default.
- Q92745700 P304 "1619-1622" @default.
- Q92745700 P31 Q13442814 @default.
- Q92745700 P356 "10.1364/OL.44.001619" @default.
- Q92745700 P433 "7" @default.
- Q92745700 P478 "44" @default.
- Q92745700 P50 Q57152281 @default.
- Q92745700 P577 "2019-04-01T00:00:00Z" @default.
- Q92745700 P698 "30933105" @default.