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- Q93845988 description "article scientifique publié en 2019" @default.
- Q93845988 description "wetenschappelijk artikel" @default.
- Q93845988 description "наукова стаття" @default.
- Q93845988 name "The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe2O3 Using tert-Butylferrocene and O3" @default.
- Q93845988 name "The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe2O3 Using tert-Butylferrocene and O3" @default.
- Q93845988 type Item @default.
- Q93845988 label "The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe2O3 Using tert-Butylferrocene and O3" @default.
- Q93845988 label "The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe2O3 Using tert-Butylferrocene and O3" @default.
- Q93845988 prefLabel "The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe2O3 Using tert-Butylferrocene and O3" @default.
- Q93845988 prefLabel "The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe2O3 Using tert-Butylferrocene and O3" @default.
- Q93845988 P1476 Q93845988-93B2BB34-1E6D-48D1-8EF1-3A8D7A1B1C0F @default.
- Q93845988 P2093 Q93845988-3A7056F5-4A08-4822-9EF7-905DA9A3B4B7 @default.
- Q93845988 P2093 Q93845988-3CBCD842-4C72-414E-881A-DE0BAAFC0C9B @default.
- Q93845988 P2093 Q93845988-75AEBB5A-9550-4661-A6D1-6E218B729267 @default.
- Q93845988 P275 Q93845988-b4fb2b99-52ee-4dac-b6a5-30915004daf9 @default.
- Q93845988 P31 Q93845988-96744D1A-8898-4200-BA08-38FEBA5B92FC @default.
- Q93845988 P356 Q93845988-2DFD2082-54C3-4677-BA89-F7AE00EB5FD2 @default.
- Q93845988 P577 Q93845988-D55279B9-ABF3-4668-A3BD-9265CAEC59DC @default.
- Q93845988 P6216 Q93845988-d5f49303-8ef7-4f5b-858c-523970a8f181 @default.
- Q93845988 P356 CHEMRXIV.10413779 @default.
- Q93845988 P1476 "The Influence of Ozone: Superstoichiometric Oxygen in Atomic Layer Deposition of Fe2O3 Using tert-Butylferrocene and O3" @default.
- Q93845988 P2093 "Joel Schneider" @default.
- Q93845988 P2093 "Jon Baker" @default.
- Q93845988 P2093 "Stacey Bent" @default.
- Q93845988 P275 Q24082749 @default.
- Q93845988 P31 Q13442814 @default.
- Q93845988 P356 "10.26434/CHEMRXIV.10413779" @default.
- Q93845988 P577 "2019-11-27T00:00:00Z" @default.
- Q93845988 P6216 Q50423863 @default.