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- Q94140395 description "article scientifique publié en 2017" @default.
- Q94140395 description "im März 2017 veröffentlichter wissenschaftlicher Artikel" @default.
- Q94140395 description "wetenschappelijk artikel" @default.
- Q94140395 description "наукова стаття, опублікована в березні 2017" @default.
- Q94140395 name "Modeling of the Effect of Process Variations on a Micromachined Doubly-Clamped Beam" @default.
- Q94140395 name "Modeling of the Effect of Process Variations on a Micromachined Doubly-Clamped Beam" @default.
- Q94140395 type Item @default.
- Q94140395 label "Modeling of the Effect of Process Variations on a Micromachined Doubly-Clamped Beam" @default.
- Q94140395 label "Modeling of the Effect of Process Variations on a Micromachined Doubly-Clamped Beam" @default.
- Q94140395 prefLabel "Modeling of the Effect of Process Variations on a Micromachined Doubly-Clamped Beam" @default.
- Q94140395 prefLabel "Modeling of the Effect of Process Variations on a Micromachined Doubly-Clamped Beam" @default.
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- Q94140395 P1476 "Modeling of the Effect of Process Variations on a Micromachined Doubly-Clamped Beam" @default.
- Q94140395 P2093 "Lili Gao" @default.
- Q94140395 P2093 "Qing-An Huang" @default.
- Q94140395 P2093 "Zai-Fa Zhou" @default.
- Q94140395 P275 Q20007257 @default.
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- Q94140395 P31 Q13442814 @default.
- Q94140395 P356 "10.3390/MI8030081" @default.
- Q94140395 P433 "3" @default.
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- Q94140395 P577 "2017-03-05T00:00:00Z" @default.
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- Q94140395 P932 "6190047" @default.