Matches in Wikidata for { <http://www.wikidata.org/entity/Q98156533> ?p ?o ?g. }
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- Q98156533 description "2020 nî lūn-bûn" @default.
- Q98156533 description "2020年の論文" @default.
- Q98156533 description "2020年学术文章" @default.
- Q98156533 description "2020年学术文章" @default.
- Q98156533 description "2020年学术文章" @default.
- Q98156533 description "2020年学术文章" @default.
- Q98156533 description "2020年学术文章" @default.
- Q98156533 description "2020年学术文章" @default.
- Q98156533 description "2020年學術文章" @default.
- Q98156533 description "2020年學術文章" @default.
- Q98156533 description "2020年學術文章" @default.
- Q98156533 description "2020年學術文章" @default.
- Q98156533 description "2020年學術文章" @default.
- Q98156533 description "2020년 논문" @default.
- Q98156533 description "article científic" @default.
- Q98156533 description "article scientific" @default.
- Q98156533 description "article scientifique" @default.
- Q98156533 description "articol științific" @default.
- Q98156533 description "articolo scientifico" @default.
- Q98156533 description "artigo científico" @default.
- Q98156533 description "artigo científico" @default.
- Q98156533 description "artigo científico" @default.
- Q98156533 description "artikel ilmiah" @default.
- Q98156533 description "artikull shkencor" @default.
- Q98156533 description "artikulong pang-agham" @default.
- Q98156533 description "artykuł naukowy" @default.
- Q98156533 description "artículo científico publicado en 2020" @default.
- Q98156533 description "artículu científicu" @default.
- Q98156533 description "bilimsel makale" @default.
- Q98156533 description "bài báo khoa học" @default.
- Q98156533 description "naučni članak" @default.
- Q98156533 description "scienca artikolo" @default.
- Q98156533 description "scientific article published on 26 July 2020" @default.
- Q98156533 description "scientific article published on 26 July 2020" @default.
- Q98156533 description "scientific article published on 26 July 2020" @default.
- Q98156533 description "teaduslik artikkel" @default.
- Q98156533 description "tieteellinen artikkeli" @default.
- Q98156533 description "tudományos cikk" @default.
- Q98156533 description "vedecký článok" @default.
- Q98156533 description "vetenskaplig artikel" @default.
- Q98156533 description "videnskabelig artikel udgivet 26. juli 2020" @default.
- Q98156533 description "vitenskapelig artikkel" @default.
- Q98156533 description "vitskapeleg artikkel" @default.
- Q98156533 description "vědecký článek" @default.
- Q98156533 description "wetenschappelijk artikel" @default.
- Q98156533 description "wissenschaftlicher Artikel" @default.
- Q98156533 description "επιστημονικό άρθρο" @default.
- Q98156533 description "мақолаи илмӣ" @default.
- Q98156533 description "наукова стаття, опублікована в липні 2020" @default.
- Q98156533 description "научна статия" @default.
- Q98156533 description "научная статья" @default.
- Q98156533 description "научни чланак" @default.
- Q98156533 description "научни чланак" @default.
- Q98156533 description "מאמר מדעי" @default.
- Q98156533 description "مقالة علمية نشرت في 26 يوليو 2020" @default.
- Q98156533 description "২৬ জুলাই ২০২০-এ প্রকাশিত বৈজ্ঞানিক নিবন্ধ" @default.
- Q98156533 description "บทความทางวิทยาศาสตร์" @default.
- Q98156533 description "სამეცნიერო სტატია" @default.
- Q98156533 name "Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication" @default.
- Q98156533 name "Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication" @default.
- Q98156533 type Item @default.
- Q98156533 label "Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication" @default.
- Q98156533 label "Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication" @default.
- Q98156533 prefLabel "Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication" @default.
- Q98156533 prefLabel "Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication" @default.
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- Q98156533 P356 MI11080724 @default.
- Q98156533 P698 32722536 @default.
- Q98156533 P1433 Q27725910 @default.
- Q98156533 P1476 "Deep Reactive Ion Etching of Z-Cut Alpha Quartz for MEMS Resonant Devices Fabrication" @default.
- Q98156533 P2093 "Bo Li" @default.
- Q98156533 P2093 "Chao Han" @default.
- Q98156533 P2093 "Cun Li" @default.
- Q98156533 P2093 "Quanwei Zhang" @default.
- Q98156533 P2093 "Yulong Zhao" @default.
- Q98156533 P275 Q20007257 @default.
- Q98156533 P31 Q13442814 @default.
- Q98156533 P356 "10.3390/MI11080724" @default.
- Q98156533 P433 "8" @default.
- Q98156533 P478 "11" @default.
- Q98156533 P577 "2020-07-26T00:00:00Z" @default.
- Q98156533 P6216 Q50423863 @default.
- Q98156533 P698 "32722536" @default.