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- W1003656120 abstract "This work deals with a chemical vapor deposition (CVD) process for deposition of amorphous silicon oxynitride films» The optical properties of these films are of specific interest* Selected CVD process parameters affecting the optical and physi cal properties of the deposited films are varied over a limited tempera ture range * The optical and'physical properties of the films are evaluated by ellipsometer and spectrophotometer measurements» Optimiza tion of the process parameters and reproducibility of the films are" @default.
- W1003656120 created "2016-06-24" @default.
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- W1003656120 date "1974-01-01" @default.
- W1003656120 modified "2023-09-26" @default.
- W1003656120 title "Optical properties of chemical vapor depositions of silicon oxynitride films" @default.
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