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- W1004989916 abstract "Thin-film thickness measurement based on spectral phase method is limited by the magnitude of the nonlinear spectral phase. To increase the sensitivity, a swept-source interferometer with recirculating sample loop is developed to obtain an amplified spectral phase from the thin-film under measurement. The spectral phase of the complex reflectivity of the thin-film can be accumulated in multiple passages of the probing light to the thin-film. After removing the linear spectral phase from the retrieved spectral phase, amplified nonlinear spectral phase corresponding to the thin-film is obtained. Using this amplified nonlinear spectral phase in a fitting model, the thin-film thickness can be determined with an enhanced precision." @default.
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- W1004989916 date "2015-11-01" @default.
- W1004989916 modified "2023-09-22" @default.
- W1004989916 title "Amplified phase measurement of thin-film thickness by swept-source spectral interferometry" @default.
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- W1004989916 doi "https://doi.org/10.1016/j.optcom.2015.07.029" @default.
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