Matches in SemOpenAlex for { <https://semopenalex.org/work/W1006959353> ?p ?o ?g. }
Showing items 1 to 100 of
100
with 100 items per page.
- W1006959353 abstract "In low energy scanning electron microscope (SEM) with primary electron energy less than 1.0 keV, the dependence of SEM contrast on crystallographic orientation within a range of 1.0 nm in depth has been investigated by utilizing 4H-SiC (0001) as a standard sample having a definitive electron penetration depth marker layer at hexagonal sites. Reflecting the difference of the direction of topmost two Si-C bilayers stacking sequence (0.50 nm in depth), clear bright and dark SEM contrast has been observed by adjusting the sample tilting and rotation angles by a conventional Everhart–Thornley type in-chamber detector. It is revealed that the brighter signal emission arises when the incident primary electron beam direction is almost parallel to the topmost stacking sequence direction. This angular coincidence was verified separately by correlating low energy SEM contrast from 3C-SiC (111) of no hexagonal sites with its electron back scattered diffraction pattern for identifying stacking sequence direction. The obtained results suggest a potential of low energy electron to characterize the crystallographic orientation just beneath the surface without using any special detector." @default.
- W1006959353 created "2016-06-24" @default.
- W1006959353 creator A5000941973 @default.
- W1006959353 creator A5004256931 @default.
- W1006959353 creator A5009633391 @default.
- W1006959353 creator A5051158409 @default.
- W1006959353 creator A5052949385 @default.
- W1006959353 date "2015-07-01" @default.
- W1006959353 modified "2023-10-18" @default.
- W1006959353 title "Crystallographic orientation dependence of SEM contrast revealed by SiC polytypes" @default.
- W1006959353 cites W1986741234 @default.
- W1006959353 cites W2003113118 @default.
- W1006959353 cites W2054360246 @default.
- W1006959353 cites W2059905503 @default.
- W1006959353 cites W2066439780 @default.
- W1006959353 cites W2068321697 @default.
- W1006959353 cites W2070029622 @default.
- W1006959353 cites W2074377567 @default.
- W1006959353 cites W2074912712 @default.
- W1006959353 cites W2083806012 @default.
- W1006959353 cites W2170272776 @default.
- W1006959353 cites W4230084882 @default.
- W1006959353 doi "https://doi.org/10.1116/1.4927136" @default.
- W1006959353 hasPublicationYear "2015" @default.
- W1006959353 type Work @default.
- W1006959353 sameAs 1006959353 @default.
- W1006959353 citedByCount "17" @default.
- W1006959353 countsByYear W10069593532016 @default.
- W1006959353 countsByYear W10069593532017 @default.
- W1006959353 countsByYear W10069593532018 @default.
- W1006959353 countsByYear W10069593532019 @default.
- W1006959353 countsByYear W10069593532020 @default.
- W1006959353 countsByYear W10069593532021 @default.
- W1006959353 countsByYear W10069593532022 @default.
- W1006959353 countsByYear W10069593532023 @default.
- W1006959353 crossrefType "journal-article" @default.
- W1006959353 hasAuthorship W1006959353A5000941973 @default.
- W1006959353 hasAuthorship W1006959353A5004256931 @default.
- W1006959353 hasAuthorship W1006959353A5009633391 @default.
- W1006959353 hasAuthorship W1006959353A5051158409 @default.
- W1006959353 hasAuthorship W1006959353A5052949385 @default.
- W1006959353 hasConcept C120665830 @default.
- W1006959353 hasConcept C121332964 @default.
- W1006959353 hasConcept C128765274 @default.
- W1006959353 hasConcept C147120987 @default.
- W1006959353 hasConcept C159985019 @default.
- W1006959353 hasConcept C16345878 @default.
- W1006959353 hasConcept C185592680 @default.
- W1006959353 hasConcept C192562407 @default.
- W1006959353 hasConcept C207114421 @default.
- W1006959353 hasConcept C2524010 @default.
- W1006959353 hasConcept C26771246 @default.
- W1006959353 hasConcept C2779328170 @default.
- W1006959353 hasConcept C33347731 @default.
- W1006959353 hasConcept C33923547 @default.
- W1006959353 hasConcept C41999313 @default.
- W1006959353 hasConcept C46141821 @default.
- W1006959353 hasConcept C62520636 @default.
- W1006959353 hasConcept C77557913 @default.
- W1006959353 hasConcept C8010536 @default.
- W1006959353 hasConcept C93877712 @default.
- W1006959353 hasConceptScore W1006959353C120665830 @default.
- W1006959353 hasConceptScore W1006959353C121332964 @default.
- W1006959353 hasConceptScore W1006959353C128765274 @default.
- W1006959353 hasConceptScore W1006959353C147120987 @default.
- W1006959353 hasConceptScore W1006959353C159985019 @default.
- W1006959353 hasConceptScore W1006959353C16345878 @default.
- W1006959353 hasConceptScore W1006959353C185592680 @default.
- W1006959353 hasConceptScore W1006959353C192562407 @default.
- W1006959353 hasConceptScore W1006959353C207114421 @default.
- W1006959353 hasConceptScore W1006959353C2524010 @default.
- W1006959353 hasConceptScore W1006959353C26771246 @default.
- W1006959353 hasConceptScore W1006959353C2779328170 @default.
- W1006959353 hasConceptScore W1006959353C33347731 @default.
- W1006959353 hasConceptScore W1006959353C33923547 @default.
- W1006959353 hasConceptScore W1006959353C41999313 @default.
- W1006959353 hasConceptScore W1006959353C46141821 @default.
- W1006959353 hasConceptScore W1006959353C62520636 @default.
- W1006959353 hasConceptScore W1006959353C77557913 @default.
- W1006959353 hasConceptScore W1006959353C8010536 @default.
- W1006959353 hasConceptScore W1006959353C93877712 @default.
- W1006959353 hasIssue "4" @default.
- W1006959353 hasLocation W10069593531 @default.
- W1006959353 hasOpenAccess W1006959353 @default.
- W1006959353 hasPrimaryLocation W10069593531 @default.
- W1006959353 hasRelatedWork W199444510 @default.
- W1006959353 hasRelatedWork W2023417435 @default.
- W1006959353 hasRelatedWork W2034148508 @default.
- W1006959353 hasRelatedWork W2037036599 @default.
- W1006959353 hasRelatedWork W2058122223 @default.
- W1006959353 hasRelatedWork W2062352967 @default.
- W1006959353 hasRelatedWork W2087281952 @default.
- W1006959353 hasRelatedWork W2104441155 @default.
- W1006959353 hasRelatedWork W2142964916 @default.
- W1006959353 hasRelatedWork W2170834607 @default.
- W1006959353 hasVolume "33" @default.
- W1006959353 isParatext "false" @default.
- W1006959353 isRetracted "false" @default.
- W1006959353 magId "1006959353" @default.
- W1006959353 workType "article" @default.