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- W101991109 abstract "Synchrotron radiation from dipole magnets in electron storage rings has emerged as a useful source of x-rays for lithography. The goal of the SXLS Project at BNL is to design and construct a compact storage ring of circumference, C = 8.503 meters. It will use superconducting dipoles with a field of B{sub 0} = 3.87 Tesla and bending radius of {rho} = .6037 meters along with 700 MeV electrons to produce 10 angstrom x-rays for lithography. The project is proceeding in two phases: in Phase I low field iron dipoles are being used; in Phase II the low field dipoles will be replaced with superconducting dipoles. An overview of the design and status report are presented." @default.
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- W101991109 date "1990-01-01" @default.
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- W101991109 title "The Brookhaven Superconducting X-Ray Lithography Source (SXLS)" @default.
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