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- W103679074 abstract "Superhard nanocomposite coatings of TiN/a-C were prepared on silicon (111) and M3 tool steel substrates using a reactive DC magnetron sputtering process. The nanocomposite coatings were prepared at various a-C and TiN layer thicknesses. Structural characterization of the coatings was done by X-ray diffraction (XRD). The nanocomposite coatings exhibited a broad (111) reflection of cubic TiN phase in the XRD. Nanoindentation data showed that ~1.5 m thick TiN/a-C nanocomposite coatings exhibited a maximum hardness of 5100 kg/mm2 for a-C and TiN layer thicknesses of ~4.5 and 10 A, respectively. The hardness was dependent on the average crystallite size (A0) of the coatings and at A0 = 90 A coatings exhibited a maximum hardness." @default.
- W103679074 created "2016-06-24" @default.
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- W103679074 date "2004-01-01" @default.
- W103679074 modified "2023-09-27" @default.
- W103679074 title "Deposition of TiN/a-C superhard nanocomposite coatings" @default.
- W103679074 hasPublicationYear "2004" @default.
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