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- W1038092049 endingPage "422" @default.
- W1038092049 startingPage "412" @default.
- W1038092049 abstract "The polymeric FAB materials of air shower used in clean room of wafer industry have been outgassed with the dynamic headspace (ca.) for half an hour, and analyzed using GC-MS. The air in the clean room running air shower was sampled using sorbent tube method, and the organic compounds adsorbed in the sorbent tube were extracted using Soxhlet extraction method, and analyzed using GC-MS. The analytical results from FAB materials of air shower (electric over current relay, acryl plate. polycarbonate window, filter, fan housing, steel galvanized cold plate and canvas buffer) indicated that most of chemicals were originated from polymer fragments of FAB materials. Their analytical results have been compared with those from the air of clean room running air shower. These comparative results could lead to identify whether the sources of trace organic contaminants in clean room air are originated from the polymeric FAB material of air shower." @default.
- W1038092049 created "2016-06-24" @default.
- W1038092049 creator A5000617958 @default.
- W1038092049 creator A5004097389 @default.
- W1038092049 creator A5022773247 @default.
- W1038092049 creator A5082180083 @default.
- W1038092049 date "2000-01-01" @default.
- W1038092049 modified "2023-09-28" @default.
- W1038092049 title "Semiquantitative Dynamic Headspace GC-MS Analysis for Organic Compounds Outgassed from FAB Materials of Air Shower" @default.
- W1038092049 hasPublicationYear "2000" @default.
- W1038092049 type Work @default.
- W1038092049 sameAs 1038092049 @default.
- W1038092049 citedByCount "0" @default.
- W1038092049 crossrefType "journal-article" @default.
- W1038092049 hasAuthorship W1038092049A5000617958 @default.
- W1038092049 hasAuthorship W1038092049A5004097389 @default.
- W1038092049 hasAuthorship W1038092049A5022773247 @default.
- W1038092049 hasAuthorship W1038092049A5082180083 @default.
- W1038092049 hasConcept C112570922 @default.
- W1038092049 hasConcept C127413603 @default.
- W1038092049 hasConcept C150394285 @default.
- W1038092049 hasConcept C178790620 @default.
- W1038092049 hasConcept C185592680 @default.
- W1038092049 hasConcept C18903297 @default.
- W1038092049 hasConcept C2776732256 @default.
- W1038092049 hasConcept C2777899863 @default.
- W1038092049 hasConcept C43617362 @default.
- W1038092049 hasConcept C548081761 @default.
- W1038092049 hasConcept C56200935 @default.
- W1038092049 hasConcept C78519656 @default.
- W1038092049 hasConcept C86803240 @default.
- W1038092049 hasConceptScore W1038092049C112570922 @default.
- W1038092049 hasConceptScore W1038092049C127413603 @default.
- W1038092049 hasConceptScore W1038092049C150394285 @default.
- W1038092049 hasConceptScore W1038092049C178790620 @default.
- W1038092049 hasConceptScore W1038092049C185592680 @default.
- W1038092049 hasConceptScore W1038092049C18903297 @default.
- W1038092049 hasConceptScore W1038092049C2776732256 @default.
- W1038092049 hasConceptScore W1038092049C2777899863 @default.
- W1038092049 hasConceptScore W1038092049C43617362 @default.
- W1038092049 hasConceptScore W1038092049C548081761 @default.
- W1038092049 hasConceptScore W1038092049C56200935 @default.
- W1038092049 hasConceptScore W1038092049C78519656 @default.
- W1038092049 hasConceptScore W1038092049C86803240 @default.
- W1038092049 hasIssue "4" @default.
- W1038092049 hasLocation W10380920491 @default.
- W1038092049 hasOpenAccess W1038092049 @default.
- W1038092049 hasPrimaryLocation W10380920491 @default.
- W1038092049 hasRelatedWork W1988995890 @default.
- W1038092049 hasRelatedWork W1998874636 @default.
- W1038092049 hasRelatedWork W2019798774 @default.
- W1038092049 hasRelatedWork W2029413328 @default.
- W1038092049 hasRelatedWork W2036745864 @default.
- W1038092049 hasRelatedWork W2044480277 @default.
- W1038092049 hasRelatedWork W2051434202 @default.
- W1038092049 hasRelatedWork W2077903495 @default.
- W1038092049 hasRelatedWork W2111532910 @default.
- W1038092049 hasRelatedWork W2152201743 @default.
- W1038092049 hasRelatedWork W2153802603 @default.
- W1038092049 hasRelatedWork W2374439396 @default.
- W1038092049 hasRelatedWork W2377037090 @default.
- W1038092049 hasRelatedWork W2398946709 @default.
- W1038092049 hasRelatedWork W2523040826 @default.
- W1038092049 hasRelatedWork W2619735667 @default.
- W1038092049 hasRelatedWork W3081092123 @default.
- W1038092049 hasRelatedWork W3092336298 @default.
- W1038092049 hasRelatedWork W3213018147 @default.
- W1038092049 hasRelatedWork W350629921 @default.
- W1038092049 hasVolume "13" @default.
- W1038092049 isParatext "false" @default.
- W1038092049 isRetracted "false" @default.
- W1038092049 magId "1038092049" @default.
- W1038092049 workType "article" @default.