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- W104113670 endingPage "24" @default.
- W104113670 startingPage "21" @default.
- W104113670 abstract "This paper describes methods of improving thickness uniformity for ultra-thin oxynitride dielectrics fabricated using nitrous oxide (N 2 O). In addition the electrical characterisation of these dielectrics is presented in order to ascertain the effect that the different fabrication processes have on the electrical properties." @default.
- W104113670 created "2016-06-24" @default.
- W104113670 creator A5030084230 @default.
- W104113670 creator A5032366307 @default.
- W104113670 creator A5059197862 @default.
- W104113670 date "1994-09-01" @default.
- W104113670 modified "2023-09-23" @default.
- W104113670 title "Highly Uniform RTP Growth and Characterisation of Ultra-Thin Oxynitride Dielectrics Grown in N 2 O" @default.
- W104113670 cites W1980940523 @default.
- W104113670 cites W2041096276 @default.
- W104113670 cites W2128294467 @default.
- W104113670 cites W2543607194 @default.
- W104113670 hasPublicationYear "1994" @default.
- W104113670 type Work @default.
- W104113670 sameAs 104113670 @default.
- W104113670 citedByCount "0" @default.
- W104113670 crossrefType "proceedings-article" @default.
- W104113670 hasAuthorship W104113670A5030084230 @default.
- W104113670 hasAuthorship W104113670A5032366307 @default.
- W104113670 hasAuthorship W104113670A5059197862 @default.
- W104113670 hasConcept C133386390 @default.
- W104113670 hasConcept C136525101 @default.
- W104113670 hasConcept C142724271 @default.
- W104113670 hasConcept C171250308 @default.
- W104113670 hasConcept C19067145 @default.
- W104113670 hasConcept C191897082 @default.
- W104113670 hasConcept C192562407 @default.
- W104113670 hasConcept C204787440 @default.
- W104113670 hasConcept C2779851234 @default.
- W104113670 hasConcept C49040817 @default.
- W104113670 hasConcept C71924100 @default.
- W104113670 hasConceptScore W104113670C133386390 @default.
- W104113670 hasConceptScore W104113670C136525101 @default.
- W104113670 hasConceptScore W104113670C142724271 @default.
- W104113670 hasConceptScore W104113670C171250308 @default.
- W104113670 hasConceptScore W104113670C19067145 @default.
- W104113670 hasConceptScore W104113670C191897082 @default.
- W104113670 hasConceptScore W104113670C192562407 @default.
- W104113670 hasConceptScore W104113670C204787440 @default.
- W104113670 hasConceptScore W104113670C2779851234 @default.
- W104113670 hasConceptScore W104113670C49040817 @default.
- W104113670 hasConceptScore W104113670C71924100 @default.
- W104113670 hasOpenAccess W104113670 @default.
- W104113670 hasRelatedWork W1482914197 @default.
- W104113670 hasRelatedWork W1498703041 @default.
- W104113670 hasRelatedWork W1526373063 @default.
- W104113670 hasRelatedWork W1531092060 @default.
- W104113670 hasRelatedWork W1626016938 @default.
- W104113670 hasRelatedWork W2026390926 @default.
- W104113670 hasRelatedWork W2029816388 @default.
- W104113670 hasRelatedWork W2032661306 @default.
- W104113670 hasRelatedWork W2035617189 @default.
- W104113670 hasRelatedWork W2039170316 @default.
- W104113670 hasRelatedWork W2066635665 @default.
- W104113670 hasRelatedWork W2162250904 @default.
- W104113670 hasRelatedWork W2203534748 @default.
- W104113670 hasRelatedWork W2398999896 @default.
- W104113670 hasRelatedWork W2517800498 @default.
- W104113670 hasRelatedWork W2533059188 @default.
- W104113670 hasRelatedWork W2548643075 @default.
- W104113670 hasRelatedWork W2789412254 @default.
- W104113670 hasRelatedWork W3142752736 @default.
- W104113670 hasRelatedWork W1808035908 @default.
- W104113670 isParatext "false" @default.
- W104113670 isRetracted "false" @default.
- W104113670 magId "104113670" @default.
- W104113670 workType "article" @default.