Matches in SemOpenAlex for { <https://semopenalex.org/work/W1042859384> ?p ?o ?g. }
- W1042859384 endingPage "199" @default.
- W1042859384 startingPage "193" @default.
- W1042859384 abstract "SrTiO3 (STO) thin films have been prepared by reactive RF magnetron sputtering on Si (100) and UV fused silica substrates at room temperature. The effect of oxygen flow on film characteristics was investigated at a total gas flow of 30 sccm, for various O2/O2 + Ar flow rate ratios. As-deposited films were annealed at 700 °C in oxygen atmosphere for 1 h. Post-deposition annealing improved both film crystallinity and spectral transmittance. Film microstructure, along with optical and electrical properties, was evaluated for both as-deposited and annealed films. Abroad photoluminescence emission was observed within the spectral range of 2.75–3.50 eV for all STO thin films irrespective of their deposition parameters. Upon annealing, the optical band gap of the film deposited with 0% O2 concentration slightly blue-shifted, while the other samples grown at higher oxygen partial pressure did not show any shift. Refractive indices (n) (at 550 nm) were in the range of 2.05 to 2.09, and 2.10 to 2.12 for as-deposited and annealed films, respectively. Dielectric constant values (at 100 kHz) within the range of 30–66 were obtained for film thicknesses less than 300 nm, which decreased to ~ 30–38 after post-deposition annealing." @default.
- W1042859384 created "2016-06-24" @default.
- W1042859384 creator A5001862670 @default.
- W1042859384 creator A5019913528 @default.
- W1042859384 creator A5027283106 @default.
- W1042859384 creator A5032300781 @default.
- W1042859384 creator A5038349105 @default.
- W1042859384 creator A5049876076 @default.
- W1042859384 creator A5087823302 @default.
- W1042859384 date "2015-09-01" @default.
- W1042859384 modified "2023-09-27" @default.
- W1042859384 title "Effect of O2/Ar flow ratio and post-deposition annealing on the structural, optical and electrical characteristics of SrTiO3 thin films deposited by RF sputtering at room temperature" @default.
- W1042859384 cites W1569450122 @default.
- W1042859384 cites W1621118016 @default.
- W1042859384 cites W1643713250 @default.
- W1042859384 cites W1654079308 @default.
- W1042859384 cites W1980993061 @default.
- W1042859384 cites W1981906457 @default.
- W1042859384 cites W1982104050 @default.
- W1042859384 cites W1993717184 @default.
- W1042859384 cites W1994229803 @default.
- W1042859384 cites W1996710612 @default.
- W1042859384 cites W1998336164 @default.
- W1042859384 cites W1998454462 @default.
- W1042859384 cites W2003518692 @default.
- W1042859384 cites W2004068297 @default.
- W1042859384 cites W2021099533 @default.
- W1042859384 cites W2033958742 @default.
- W1042859384 cites W2034603048 @default.
- W1042859384 cites W2036631773 @default.
- W1042859384 cites W2036704861 @default.
- W1042859384 cites W2041619765 @default.
- W1042859384 cites W2041664428 @default.
- W1042859384 cites W2041924858 @default.
- W1042859384 cites W2041963998 @default.
- W1042859384 cites W2047483798 @default.
- W1042859384 cites W2048172565 @default.
- W1042859384 cites W2054604874 @default.
- W1042859384 cites W2056190389 @default.
- W1042859384 cites W2057985272 @default.
- W1042859384 cites W2059264488 @default.
- W1042859384 cites W2061792546 @default.
- W1042859384 cites W2062418383 @default.
- W1042859384 cites W2070195338 @default.
- W1042859384 cites W2075803138 @default.
- W1042859384 cites W2077642559 @default.
- W1042859384 cites W2079840446 @default.
- W1042859384 cites W2091041127 @default.
- W1042859384 cites W2119877111 @default.
- W1042859384 cites W2121863256 @default.
- W1042859384 cites W2123319411 @default.
- W1042859384 cites W2128994624 @default.
- W1042859384 cites W2132974476 @default.
- W1042859384 cites W2156731263 @default.
- W1042859384 cites W2482824002 @default.
- W1042859384 cites W56094024 @default.
- W1042859384 cites W2067761232 @default.
- W1042859384 cites W2104703201 @default.
- W1042859384 doi "https://doi.org/10.1016/j.tsf.2015.07.060" @default.
- W1042859384 hasPublicationYear "2015" @default.
- W1042859384 type Work @default.
- W1042859384 sameAs 1042859384 @default.
- W1042859384 citedByCount "14" @default.
- W1042859384 countsByYear W10428593842017 @default.
- W1042859384 countsByYear W10428593842018 @default.
- W1042859384 countsByYear W10428593842020 @default.
- W1042859384 countsByYear W10428593842021 @default.
- W1042859384 countsByYear W10428593842022 @default.
- W1042859384 crossrefType "journal-article" @default.
- W1042859384 hasAuthorship W1042859384A5001862670 @default.
- W1042859384 hasAuthorship W1042859384A5019913528 @default.
- W1042859384 hasAuthorship W1042859384A5027283106 @default.
- W1042859384 hasAuthorship W1042859384A5032300781 @default.
- W1042859384 hasAuthorship W1042859384A5038349105 @default.
- W1042859384 hasAuthorship W1042859384A5049876076 @default.
- W1042859384 hasAuthorship W1042859384A5087823302 @default.
- W1042859384 hasBestOaLocation W10428593842 @default.
- W1042859384 hasConcept C113196181 @default.
- W1042859384 hasConcept C121332964 @default.
- W1042859384 hasConcept C133386390 @default.
- W1042859384 hasConcept C153294291 @default.
- W1042859384 hasConcept C159985019 @default.
- W1042859384 hasConcept C171250308 @default.
- W1042859384 hasConcept C185592680 @default.
- W1042859384 hasConcept C19067145 @default.
- W1042859384 hasConcept C192562407 @default.
- W1042859384 hasConcept C199289684 @default.
- W1042859384 hasConcept C22423302 @default.
- W1042859384 hasConcept C2777855556 @default.
- W1042859384 hasConcept C39353612 @default.
- W1042859384 hasConcept C43617362 @default.
- W1042859384 hasConcept C46275449 @default.
- W1042859384 hasConcept C49040817 @default.
- W1042859384 hasConcept C61427134 @default.
- W1042859384 hasConcept C85080765 @default.
- W1042859384 hasConcept C87976508 @default.
- W1042859384 hasConceptScore W1042859384C113196181 @default.
- W1042859384 hasConceptScore W1042859384C121332964 @default.